Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECP1, NPN, Programless Type, I/O Cable Length for LEC:

Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, NPN, Step Data Input Type, I/O Cable Length for

Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for

Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 20m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 500mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 500mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 5m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 500mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 500mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 500mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEY, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: D (In-line), Lead: A (16: 10mm; 25: 12mm; 32, 40: 16mm), Stroke: 500mm

Driver Type: AP (Pulse Input Type, PNP), I/O Cable Length, m: 1 (1.5), Driver Mounting: Screw Mounting, Size: 32, Motor Mounting Position: D (In-line), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 500mm

Driver Type: AP (Pulse Input Type, PNP), I/O Cable Length, m: None, Driver Mounting: Screw Mounting, Size: 32, Motor Mounting Position: D (In-line), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 500mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Actuator Series: LEY (Rod Type), Size: 32, Motor Mounting Position: D (In-Line Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 500mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length, m: 5, Actuator Series: LEY (Rod Type), Size: 32, Motor Mounting Position: D (In-Line Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 500mm

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

CQ2

(mm) Standard stroke range Bore H A 115 115 125 B 83 83 91 C (2) D 36 36 40 E 142 158 178 I 190 210 238 J 11 10 10 K 32 32 36 L 16 16 17 M 114 128 144 N 12.5 12.5 14.5 OA OB 21.2 21.2 24.2 Q 24.5 24.5 27.5 RA 25 25 28 RB 18.4 18.4 21.2 S 162 177 197 U 80 88 98 125 140 160 30(22.5) 30(22.5) 33(26.5) M22 X 2.5 M14 X 2 10, 20, 30, 40, 50 75, 100, 125, 150 175, 200, 250, 300 M22 X 2.5 M14 X 2

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R