CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

smcmaintenancepartslist

MXF12 0.47 M2.5 x 8 MXF16 0.88 M3 x 10 MXF20 M4 x 14 2.06 Loctite No. 242 of Henkel Japan Ltd. or its equivalent is applied. 1-7.

TABLE OF CONTENTS

PORTS PORTS PORTS PORTS 500 500 1/32 .024 22G7DGV 22G9DGV 22G7DCV 22G9DCV 250 (500) 250 (500) 3/64 .052 22H7DGV 22H9DGV 22H7DCV 22H9DCV 200 (400) 200 (400) 1/16 .095 22J7DGV 22J9DGV 22J7DCV 22J9DCV 125 (300) 125 (250) 3/32 .156 22K7DGV 22K9DGV 22K7DCV 22K9DCV 100 (200) 100 (200) 1/8 .284 22N7DGV 22N9DGV 22N7DCV 22N9DCV 75 50 5/32 .404 22O7DGV 22O9DGV 22O7DCV 22O9DCV 50 25 3/16 .500 22P7DGV

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note) AC-type models that are CE-compliant have DIN terminals only. 164 3 Port Valve 10-SY300/500 Note) CE-compliant: For DC only.

Series PF2W Digital Flow Switch For Water

(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)

MXH

Selection conditions Mounting: Horizontal Max. speed: 500 mm/s Load eccentricity: 50 mm Overhang: 30 mm Load weight: 0.1 kg Max. speed: 500 mm/s Overhang: 40 mm Load weight: 0.1 kg Refer to Graph (3) based on vertical mounting and a speed of 500 mm/s. In Graph (3), find the intersection of a 40 mm overhang and load weight of 0.1 kg, which results in a determination of 20.

Modular F.R.L. Units

(ANR) ( 0.8 ppm) 2 3 AFD20-A to AFD40-06-A Max. 0.1 mg/m3 (ANR) (Before saturated with oil 0.01 mg/m3 (ANR) or less 0.008 ppm) 2 3 Rated flow [L/min (ANR)] 1 AFM20-A to AFM40-06-A 200 450 1100 AFD20-A to AFD40-06-A 120 240 600 Drain capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight [kg] 0.09 0.19 0.38 0.43 1 Conditions: Inlet

240

Selection conditions Mounting: Horizontal Maximum speed: 500 mm/s Load eccentricity L1: 50 mm Overhang L: 30 mm Load mass m: 0.1 kg Refer to Graph 0 based on horizontal mounting, a speed of 500 mm/s and load eccentricity L1 of 50 mm.

Sine Rodless Cylinder Series REBR Direct Mount Type

750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

2 Phase Stepper Motor/Without Motor Brake Series LXS

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

MXS Series Air Slide Table

Axial piping (6) MXS6P 32 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Dimensions not indicated are the same as basic type. 55 MXS Series Air Slide Table Dimensions MXS 8 2-M3 X 0.5 thread 4 deep Operating port 2-M5 X 0.8 7 2 3.5 J 6 Max.9.5 (With stroke adjuster at retraction end) I Basic type 6.5 4 6.5 7 7 3.8 NA-M3 X 0.5 thread 4 deep 14.6 K 7 3.8 14.6 KA 2 (With stroke adjuster at

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY Graph (1) MG 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

G: 300 H: 600 2-3.2 eauivalent Bracket (Lead wire length) (Mounting holes) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4 (GZ, GS: 41.1) [42.1] 91.7 (GZ, GS: 93.1) [95.1] R R P 11 0.5 10 5-M3 X 0.5 (Piping port) 7 7 [ ] for AC M plug connector (M): SYJ3 20-lMll-M3 3 4 5 3 4 5 L plug connector (L): SYJ3 20-lLll-M3 30.5 19.5 30.5 19.5 300 5.3 1.8 1.8 5.3

Proposals for Energy Saving

100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 Specifications 0 to 0.7MPa Operating pressure 1.05MPa Proof pressure 5 to 50C Ambient and fluid temperature Turbine oil (40 to 100cSt) Fluid Converter standard effective oil level stroke/Effective volume (cm) Nominal size of converter (mm) Standard effective oil level stroke (mm) Maximum flow (l/min) 50 100 200 300 400 500 600

ITV

Count Pressure Characteristics Flow Characteristics Supply pressure: 0.6 MPa Set pressure: 0.25 MPa 600 1 500 kPa 500 Output deviation factor (% F.S.) 0.5 Set pressure (kPa) 400 kPa 400 Out 300 kPa 300 0 Return 200 kPa 200 0.5 100 kPa 100 50 kPa 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2 1 3 4 5 6 0 7 1.0 Supply pressure (MPa) Flow rate (l/min (ANR)) 14-8-6 7 Compact Electro-pneumatic Regulator

Compact

LEMB25 LEMB32 0 2 4 6 8 10 12 14 16 18 20 22 12 Combining with external guide 10 Combining with external guide Work load [kg] Work load [kg] 8 6 External guide unused External guide unused 4 2 0 0 500 1000 1000 500 0 Speed [mm/s] Speed [mm/s] LEMC25 LEMC32 0 2 4 6 8 10 12 14 16 18 20 22 12 10 Work load [kg] Work load [kg] 8 6 4 2 0 0 500 1000 0 500 1000 Speed [mm/s] Speed [mm/s] LEMH/HT25

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.