SV

fitting for 3/8" One-touch fitting for 5/16" One-touch fitting for 3/8" NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 One-touch fitting for 5/16" SV1000 P, E port location One-touch fitting for 3/8" SV2000 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) One-touch fitting for 3/8" SV3000 SUP/EXH block assembly specifications One-touch fitting for 3/8" Nil S R RS

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

S + Stroke ZZ + Stroke (E1) E (F1) F GA 77(85) Bore size (mm) S ZZ WA TA 32 40 50 63 80 100 119(127) 22 17 2 18 17 18 2 84(93) 136(145) 22 18 2 25 21 19 2 97(109) 157(169) 25 20 2 30 26 21 2 97(109) 157(169) 25 20 2 32 26 21 2 116(130) 190(204) 30 3 40 32 28 3 117(131) 191(205) 31 3 50 37 29 3 These dimensions and other dimensions not indicated here are the same as standard. ( ): Denotes

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

CL

3 !4 !5 !6 !

Table of Contents

How to Order Manifold VV5Q1 3 08 S 1 N P Option None DIN rail mounting style Special wiring specifications (Except double wiring) With name plate Built-in silencer, direct exhaust (U side only) Nil D K N S Cable (Length) Series VQ1000 Manifold Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) 0 1 2 3 (2) Plug-in unit/Flip 3 Stations 01 1 station When two or more symbols are

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

Electric Actuator with Integrated Guide

Contact pin (preassembled) N 3 Terminal Pin no.

Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

CL

3 !4 !5 !6 !7 !8 !

XL

5 G Normally closed high vacuum straight solenoid valve Spacer Nil A None With spacer Solenoid size 1 2 No.1 No.2 Refer to Table 3 below in case spacers only are required separately. 3 No.3 Electrical options Orifice symbol Nil S None With surge voltage suppressor L With light 1 2 2 3 3 4.5 Z With light/Surge voltage suppressor 4 6 Refer to Table 2 below for applications.

SX

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 114 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type

Modular F.R.L. Unit

Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D

Table of Contents

-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C-3 AM850-20 AMD850-20 75 AMF1000-40 AMF900-30 AMF850-20 AMD850-20 AMD910-30 AMD910-40 AMD1010-40 IDF120D-3 110 150 220 IDF120D-3 IDF150D-3 IDF240D-3 AMF1000-40 For Rotary Screw Compressors (Without Aftercooler) Air compressor Refrigerated air dryer with built-in air cooled aftercooler (4)(6) Local line Flow capacity (m 3/min)

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

MY2

speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm

LEC-OM02904

PB14 NHQ1 1 0h 1 0 0 0 40dB 1 14dB 2 8dB 3 4dB 0 2 1 3 2 4 3 5 No.PB01()1 No.PB010 PB15 NH2 2 2No.PB16(2)1 4500 Hz 100 4500 PB16 NHQ2 2 0h 2 0 2 0 1 2 0 1 0 40dB 1 14dB 2 8dB 3 4dB 0 2 1 3 2 4 3 5 PB17 No.PB06() PB18 LPF No.PB23()0 No.PB231 3141 rad/s 100 18000 5 16 5 No.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Best Pneumatics Vol. 14

8 1/2 3/4 1/8 1/4 1/4 Port size 3/4 1 1 G 1 1/4 3/8 3/8 PPA How to Order Refer to the next page.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19