Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

CA2

e l H ZZ f h ZZ C85 84 1/4 51 186 43 11.2 59 1/4 stroke 194 40 202 C95 50 90 3/8 58 206 52 11.2 66 1/4 stroke 214 222 63 98 3/8 58 214 52 11.2 66 1/4 stroke 222 230 CP95 80 116 1/2 71 258 65 12.5 80 1/4 stroke 267 276 100 126 1/2 72 270 65 14.0 81 1/4 stroke 279 288 NCM Axial Foot Style: CA2WLH NCA S + Stroke H H + Stroke 2-P (Rc, NPT, G) K A G G F K A F B1 4-J AL AL Width across flats KA

5

S 1 pc. n n pcs.

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

Shock Absorbers and Rate Controls

*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

0.4

Note 3) Symbols for inch sizes are as follows: N1: 1/8" N3: 5/32" N7: 1/4" NM: Mixed The top ported elbow is LN and the bottom ported elbow is BN. Note) For the S kit compatible with AS-Interface, the maximum number of stations is limited. Refer to page 805 in Best Pneumatics No. 1-1 for details. Input block type (Enter EX250-compliant S kit only.)

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

42

Note 1) Combination of [C l] and [S ] is not possible.

Free Mount Cylinder

31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Rotary Actuator/Vane Type

1 i o !

Table of Contents

Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to

Air Cylinder

40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131 119 156 144 181 25 11 11 M6 x 0.75 94 136 119 161 144 186 169 211 32 11 10 M8 x 1.0 96 138 121 163 146 188 171 213 40

Modular Design with Uniform Body Style

R S U V1 V2 AC20C-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 40 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30C-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 50 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40C-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 75 35.5 50 75.2 40 55 9 18 7 50 65 AC40C-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 75 35.5 50 80.2 40 55 9 18 7 50 65 Model Optional

Title not found

absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

SFOD-OMT0009CN

0.0 5.0 4 INC 50 50.0 1000 1000 1 0.0 0.0 10.0 0 1 (3) LIN-A / LIN-I Step No. mm/s 1 2 2 2 mm/s mm/s / mm mm mm 1 LIN-A 100 200.00 1000 1000 0.0 0.0 0.5 2 LIN-A 100.00 0.0 0.0 0.5 0 3 LIN-A 100.00 0.0 0.0 0.5 2) 4 1) 1)LIN-I 2)LIN-A LIN-I 3 4 54 No.SFOD-OMT0009CN-B (4) CIR-R / CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series KV2 Fittings

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.