1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

NCQ8

3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Table of Contents

2 !

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6

NCA1

13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1-P1000 2 1 3/8 21/32 5 7/8 3 2 1/8 1 3/8 1 5/8 3.81 NCA1-P1200 2 1/2 1 3/4 29/32 6 1/2 7/8 3 1/8 2 1/4 1 3/4 2 1/8 4.95 NCA1-P1400 2 1/2 2 1 1/16 7 1/2 1 3 1/2 2 1/2 2 2 7/16 5.75 NCA1-P1401 3 2 1/2 1 3/16 8 1/2 1 3/4 4 3/4 2 5

LEC-OM02904

EMC (2) EMC EMC MCCB MC MCCB MC L1 1 4 (1) 1 L2 2 5 L3 3 6 E L11 L21 2 1 RAV-781BXZ-4 (2) 1 (RAV-781BYZ-2) () 1 2 3 2 2 RAV-781BXZ-4 (2) 2 (RAV-781BXZ-4) () 1 2 3 1.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

CA2

2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 Different sides D-A44C With n Same side 10 75 80 90 1 2 (Different sides and same side) With 1 85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 (n 2) 2 n = 2, 4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16

Table of Contents

Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best when dry air with a low dew point is needed.

MY1

2 2 2 2 4 Note) Two types of dust seal band are available.

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 10 75 90 100 110 D-A9lV n (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.