High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

MY1

Cushion needle TT UU TT UU 10 G NW A GB MW 2-P (Hexagon socket head taper plug) N Z + Stroke WW WW P (Hexagon socket head taper plug) P (Hexagon socket head taper plug) XX XX P (Port) P (Port) Centralized piping 2-ZZ (Hexagon socket head taper plug) VV VV Centralized piping 2-ZZ (Hexagon socket head taper plug) S 1.1 WX 11.4 Bottom port (ZZ) (Applicable O-ring) Y 2-d Bore size (mm) 25 32

MY2

resin NBR NBR NBR NBR NBR No. 14 15 22 50 51 52 53 54 Qty. 1 1 2 2 2 2 4 2 14 Series MY2C 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Work piece mounting center line LD through hole PA Work piece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Cushion needle TT UU TT UU 10 G NW A GB MW 2-P (Hexagon socket head taper plug) N Z + Stroke WW WW P (Hexagon socket head taper plug) P (Hexagon socket head taper plug) XX XX P (Port) P (Port) Centralized piping 2-ZZ (Hexagon socket head taper plug) VV VV Centralized piping 2-ZZ (Hexagon socket head taper plug) S 1.1 WX 11.4 Bottom port (ZZ) (Applicable O-ring) Y 2-d Bore size (mm) 25 32

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

MY1

O-ring) Y 2 x 4 A B 6.0 C 3.5 CH 25 G 13.5 GA 8.5 GB 16.2 H 52 HH 27.7 J K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6.0 MM N 20 NC 14 NE 49.5 NH 16.5 Bore size (mm) 16 20 090 M5 x 0.8 M4 x 0.7 110 7.5 4.5 26 12.5 12.5 20.0 58 33.7 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 21.7 NW PA PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 16 20 07.5 11.5 56 60 40 50 94 100 3.5 4.5

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 100mm, Port Thread: TN (NPT), Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Air Cushion, Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal,

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Air Cushion, Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9N, Lead Wire Length

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9P, Lead Wire

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: B54, Lead Wire

Magnet: None, Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 50mm, Port Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8