Table of Contents

OFF n-3 Accumulated flow rate Note 1) n Note 1) Output mode is set to inverted output at the factory before shipment.

2/3 Port Valve

Model N N.C.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil N PNP output ( COM.)

MGP

MGP M 25 30 M9BW M L A S 2 S 1 n n ( 12 12mm 40 40mm 16 16mm 50 50mm 20 20mm 63 63mm 25 25mm 80 80mm 32 32mm 100 100mm A (MGPM,L,A 16100) M5X0.8 Rc N NPT TF G (mm) 2. (mm) MGP12,16,20,25,32,40,50,63,80,100 MGP-A 16,20,25,32,40,50,63,80,100 MGPS50,80 3.

SYJ300/500/700

(Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=17 14.5 (Pitch) P=16 14.5 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 Station n L1 L2 L1 L2 Station 2 52 43 53 44 Station 20 340 331 359 350 3 68 59 70 61 4 84 75 87 78 5 100 91 104 95 6 116 107 121 112 7 132 123 138 129 8 148

3 Port Air Operated Valve Series SYJA300

(Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6

VZ100/300/500

1/8 (Pitch) (Pitch) (A port) Stations n Port size L1 L2 20 350 341 19 334 325 18 318 309 17 302 293 16 286 277 15 270 261 14 254 245 13 238 229 12 222 213 11 206 197 10 190 181 9 174 165 8 158 149 7 142 133 6 126 117 5 110 101 4 94 85 3 78 69 2 62 53 M5 L3 47 63 79 95 111 127 143 159 175 191 207 223 239 255 271 287 303 319 335 L1 L2 Rc 1/8 63 54 80 71 97 88 114 105 131 122 148 139 165 156

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

CY1F

[The voltage drop will be n times larger when n auto switches are connected.] Even though an auto switch operates normally, the load may not operate.

MK

M S Model With arm: MK -N 12 16 MKB12-N MKB16-N 4 20 29 8 18.5 M3 x 0.5 8 5 25 36 11 21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp stroke

MNB

Double rod type n n pcs. Type of auto switch Mounting bracket Nil Without auto switch B Basic type Select the applicable auto switch type from the table below.

100

A 22.2 40 N 9.8 7.9 214.6 26.6 188 55 124 Vacuum (2/V) port thread type symbol Nil: Rc thread F: G thread N: NPT thread 2 x 4.1 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust port thread type symbol Nil: Rc thread F: G thread N: NPT thread (30) Pressure gauge (Included) 3 x 4.4 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust direction (6) 9

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Stations (Max. 20 stations) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373 11 186 196 225 235.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148

Low Profile Guide Type

M3 M3E m x g FE L2 DFrom above, n = 1 + 2 + 3A + 3B = 0.1 + 0.082 + 0.35 + 0.28 = 0.812 From n = 0.812 1, it is applicable.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Bore size (mm) Allowable kinetic energy for intermediate stop Es (J) 10 0.03 15 0.13 25 0.45 8-16-8 8 Series CY1F Model Selection 2 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note MX Review m m max is the maximum load mass at a 1.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

MK

REA Rotary Angle Theoretical Force Unit: N REC Operating pressure (MPa) Bore size (mm) Rod dia.