125

y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

D-F5BAL/F59F D-F5W/J59W CP95 ~ = NCM ~ = ~ = NCA D-X 20Proper Auto Switch Mounting Position Auto Switch Mounting Height Data D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A59W D-F5NTL Bore size (mm) A B A B A B A B Hs Hs Hs Ht Hs Ht 74.5 125 0 0 2 2 4.5 4.5 9.5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 59 Series C96 Dimensions Bore size Stroke Basic: C96S(D)B SW PL 2 x EE PL KK WA B D B R E WB Cushion valve 8 x RT VD L9 BG L2 L12 A WH G H G L8 + Stroke VA ZZ + Stroke R E With rod boot e d f l h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E R Bore size (mm) Without rod boot With rod

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

AC

Note 2) Without valve mechanism Option Combinations Combinable Impossible Depends on the model Applicable Filter Regulator Option Auto drain Symbol AW4000 Description AW1000 D D C 1 2 6 8 C J N R W AW2000 AW3000 D D C 1 2 6 8 C J N R W Auto drain pressure differential style Auto drain float style (N.O.)

VM

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5 1 Hand Valve Series VH Specifications SA Fluid Air VA Proof pressure 1.5 MPa SA Max. operating pressure VH200/300/400 1.0 MPa VH600 0.7 MPa VA Ambient temperature and operating fluid temperature 5 to 60C (No freezing) Operating angle 90 VM Courtesy of Steven

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB L ML T U VA VB OA OB PA PB PW R S K Q MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 46 56 54 62 7.5 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 7.5 46 56 54 62 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Table of Contents

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

3 Port Solenoid Valve Metal Seal Series VZ200 1

wire length) With light/surge voltage suppressor Max.10 80 82.5 74.9 300 300 (Lead wire length) S070 L side 18 15.4 Manual override (Non-locking) VQ 300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129

5 Port Solenoid Valve SY Series

SY7000 3 8" N11 N9 N11 5 16" SY9000 3 8" Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC M plug connector DIN terminal Manual override Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type G:Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm