1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

MY1

3 e w !6 r !9 Note) With top cover removed !

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

Series SV

IP65 R C US TYPE1 TYPE1 US C R R R R R R R TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 248 223 210.5 185.5 173 148 123 110.5 Rail length L1 237.5 212.5 200 175 162.5 137.5 112.5 100 Mounting pitch L2 222 202 182 162

MY1

Horizontal Vertical (downward) Vertical (upward) 100 10 20 30 40 50 100 200 500 Load weight kg m s m s Type of impact MY1HT63 Horizontal impact: P = 0.5MPa s 2000 1500 1000 m Impact speed mm/s L unit 1 m 2 Kinetic energy E 500 400 300 200 Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E 100 10 20 30 40 50 100 200 300 5001000 Symbols : Speed of impacting object (m/s) m: Weight

SV

7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Vacuum Unit

E 0 to 101 kPa Pressure switch for vacuum Open collector 2 outputs F 100 to 100 kPa V 100 to 100 kPa Pressure switch for vacuum with energy saving function Open collector 1 output Connector assembly Construction y p. 31 w Output e Unit ZK2 LV A W Valve type K/R Valve type J Nil Unit selection function1 M SI unit only2 A NPN B PNP Red White Applicable valve type Red Lead wire length 1 The

JIS Standard Hydraulic Cylinder

65 55 M39 x 1.5 60 57 45 15 41 119 301 M30 x 1.5 45 42 35.5 13 30 104 286 0.030 0.076 0.036 0.090 100 100 0.23 80 65 M48 x 1.5 75 72 56 16 50 143 333 M39 x 1.5 60 57 45 15 41 128 318 367 CH2E/CH2F/CH2G/CH2H Series Dimensions Head rectangular flange type: CH2EFB, CH2FFB GB R H + Q + l GA H 2 x Rc P 4 x FD J Air release MM e D E BB FY Width across flats G Air release NA T FT NB 10 f l C SS

Modular F.R.L. Units

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

SQ1000/2000

-4-C10(-S) SUP block plate SSQ1000-B-R Blanking plug KQ2P-04/06/08/10 Dual flow fitting SSQ2000-52AP. 101 P. 98 P. 100 P. 102 C10 N11 P R D side U side Port plug VVQZ2000-CP Silencer (for EXH port) Individual SUP spacer SSQ2000-P-4EXH block plate SSQ2000-B-R P. 102 P. 98 P. 100 P. 101 C8 L8 P R D side SMC AN200 U side Individual EXH spacer SSQ2000-R-4Special wiring specification (-K) Back

Electric Actuator with Integrated Guide

F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E F Mitsubishi Electric Corporation 100W None Switch specification Yasukawa Electric Corporation 200W

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Stability of suction position,

w w t t w u t r r e r r r e e e q q q q q With set screw With male thread adapter (Vacuum inlet: Vertical) With female thread plate (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Lateral) Component Parts (Male thread) Component Parts (Female thread) No.

Title not found

ro 40mm cn y q c k r l o B e .

New

E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size