EX600-SEN_eng

Green NS LED is flashing Red PWR(V) LED is On Red MS LED is flashing Red NS LED is flashing Red ST(M) LED is On Red PWR LED is On Green MS LED is On Green NS LED is On Green LEDs are On Red MS LED is On Red NS LED is On LED display The power supply for control and input is Off, or IP address is not set.

VXF

LVN TI/ TIL VXF 2150 1 G 00 PA Electrical option Model Port size Nil S L Z 3 4 3 3 ' 4 PAX 2150 2160 2280 5', ! ! !'+ PB Rated voltage Electrical entry !!" # $ %&"'(" )* +"" # $ %&"'(" )* 1 2 3 4 5 6 7 8 9 !"" # $ %&"'(" )* !

Connection Type: Others, Shape Type: [Other Related Components] Others, Material: [Stainless Steel] 316 Stainless Steel, Surface Treatment: No, Compatible Model: MS-5H-4

.): Polyurethane　(4/2.5), Gasket Material: PVC, Made to Order Specifications: N/A

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms 372 Series 10-SYJ3000/5000/7000 Specific Product Precautions 4 Be sure to read this before handling. Refer to page 1382 for Safety Instructions and pages 677 to 683 for 3/4/5 Port Solenoid Valve Precautions.

SYJ300/500/700

N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage

SYJ3000/5000/7000

Refer to page 1-7-4.)

VFR

4 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Series PF2W Digital Flow Switch For Water

(4 pc.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

JXCx-OMT0005CN

/Set 2 121 Get/Set 4 1 122 Get/Set 4 2 123 Get/Set 4 124 Get/Set 1 IO *1 Polled I/O IO Output Input 0 4 byte 4 byte 1 10 byte 2 20 byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113

4-channel Flow Monitor ( compatible)

Normal output, reversed output Switch output (During SIO mode) Maximum load current 80 mA Maximum applied voltage (NPN output) 30 VDC Internal voltage drop (Residual voltage) 1.5 V or less (Load current 80 mA) Delay time 3 5 ms or less, 0 to variable from 60 s/0.01 s increments Response time 4 3 ms or less Hysteresis Variable from zero 5 Protection Over current protection Input type Voltage

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

Ionizer

Ion polarity Switch setting Positive ion emission 8 Negative ion emission 9 4) Wiring of power supply cable Connect the dedicated power supply cable.

PSxx-OMM0002CN

(12 V ) 600 (24 V ) 50 3 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2% F.S.1 digit(253 ) ON OUT1OUT2 1 2 3 -50No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() IP65 050 -1060 () 3585RH AC250 V 1 2 M (DC50 V ) 3F.S.(25 ) 3 (N.P) 3.52 m 4 (A.B) 0.15 mm 2(AWG26) 5 (R.T.S.V) 0.95 mm CE UL/CSA RoHS 02 N02 F02 C01 A2 B2 R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 () 117 g 118 g 114 g

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

PF-OMN0011_C

Add/dEC OUT1 (29 ) OUT1 OUT1 ( [n2dH]) ( [n2AH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.