3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

CC-Link-E

O ut put area I nput area W o rd d ata area In p u t w o rd d ata Rem arks W o rd d ata area O u tp u t w o rd d ata Rem arks RW w 0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW r0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y.

NCA1

1/2 2 5/8 4 7/8 2 5/8 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 1/4 2 5/16 5 1/8 2 7/8 5 1 3/8 1-14 1 5/8 2 3/8 1 2 1/2 2 9/16 5 1/8 2 7/8 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 3/4 2 13/16 5 1/8 2 7/8 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 5/8 2 13/16 5 3/4 3 1/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 2 7/8 3 1/16 5 3/4 3 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3 3/16 5 3/4 3 1/8 BORE E EE(NPT) F G J K TD TL UT

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

Air Cylinder NCA1 Series

1/2 2 5/8 4 7/8 2 5/8 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 1/4 2 5/16 5 1/8 2 7/8 5 1 3/8 1-14 1 5/8 2 3/8 1 2 1/2 2 9/16 5 1/8 2 7/8 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 3/4 2 13/16 5 1/8 2 7/8 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 5/8 2 13/16 5 3/4 3 1/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 2 7/8 3 1/16 5 3/4 3 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3 3/16 5 3/4 3 1/8 BORE E EE(NPT) F G J K TD TL UT

Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

ITV-E

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

ISO Cylinder

Action Single acting, Single rod Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure Rubber bumper Spring return: 0.18 MPa Spring extend: 0.23 MPa Ambient and fluid temperature Without auto switch: 20C to 80C (No freezing) With auto switch: 10C to 60C (No freezing) Lubricant Not required (Non-lube) Stroke length tolerance +1.4 0 mm Piston speed 50 to 750

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

MGC

The load kinetic energy can be obtained by the following equation: 5 a 1 Rush speed into cushion (mm/s) 100 50 200 500 750 M Also, selection can be made by using the graph above. Example) Find the maximum load weight when using a cylinder with 32, stroke 500 mm, with rear plate as a lifter at an average speed of a 300 mm/s.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

25

Static Neutralization Characteristics e Potential Amplitude IZS40, 41 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 2000 2000 1750 1750 Potential amplitude (V) Potential amplitude (V) 1500 1500 1250 1250 1000 1000 1 Hz 1 Hz 30 Hz 750 750 30 Hz 500 500 250 250 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance

KT10

10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750

HRL

inlet Ventilation air outlet 715 40 or less 954 330 10 1538 A 1026 984 627 677 Anchor bolt mounting position (View A) For piping port sizes, refer to the Parts Description on page 330. 328 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Dimensions HRL300-Am-20 Ventilation air inlet Ventilation air inlet Ventilation air outlet 850 40 or less 1079 330 10 1839 A 1145 1109 700 750

CEx-OMQ0013

25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm

LEKF-OMZ0035

Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940 470 Speed [mm/s] Note2) Stroke 701 to 800 550 330 160 750

JXCx-OMU0004

900 200 900 100 900 50 900 8 150 1000 75 1000 300 1000 200 1000 75 1000 9 200 1200 100 1200 400 1200 250 1200 100 1200 10 250 1400 125 1400 500 1400 300 1400 125 1400 11 300 1600 150 1600 600 1600 400 1600 150 1600 12 350 1800 175 1800 700 1800 500 1800 175 1800 13 400 2000 200 2000 800 2000 540 2000 200 2000 14 450 2500 225 2500 900 2500 600 2500 225 2500 15 700 3000 360 3000 1100 3000 750

A

required for cartridge replacement Mist Separators are also available for the Modular Range of Air Preparation Products T E C H N I C A L SPECIFICATIONS D I M E N S I O N S M I S T S E P A R AT O R S E R I E S NAM Max Operating Pressure 1MPa / 145PSI Min Operating Pressure 0.05MPa / 8PSI Ambient & Fluid Temp 5~60C / 40~140F Filtration Degree 0.3m Oil Mist Removal 99.9% NAM150 300 NAM250 750