Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

Compact End Lock Cylinder Series CBQ2

, 100 A93V A93 A90V A90 A80 A80H Manufacture of intermediate strokes Intermediate strokes in 5mm increments can be manufactured by installing spacers in standard stroke cylinders.

1.63

Water-resistant/MGP R/V P.435 JMGP MGP Heavy duty guide rod type/MGPS MGPW MGPW P.478 Slide bearing MGQ MGG Miniature Guide Rod Cylinder/MGJ P.401 MGC MGF Compact Guide Cylinder with Lock/MLGP Slide bearing MGZ P.1075 LOCK Ball bushing MGT Hygienic Design Cylinder/HYG Best Pneumatics No.2-1 Slide bearing MGPW Series (Wide type), Stroke Variations Stroke (mm) Bore size (mm) Bearing type 25 50 75

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

240

Note 3) ( ) in column W denotes the D-A90/A93 dimensions. Operating Range (mm) Auto switch model Bore size 6 10 16 20 D-M9, M9V D-M9W, M9WV D-M9A, M9AV 3 3.5 5 6 D-A9, A9V 5 6 9 11 Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment.

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm RS Q G Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Precision Cylinder Series MTS

157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers 25 32 Bore size (mm) Part no.

Sine Rodless Cylinder Series REBR Direct Mount Type

Load voltage Lead wire length (m) Note 1) Auto switch model Indicator light Special function Type Electrical entry Applicable load Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) AC DC A90 5, 12V 24V IC circuit No 100V or less Reed switch 2 wire Relay, PLC A93 12V 100V Grommet Yes A96 3 wire (NPN equiv.) 5V IC circuit F9N 3 wire (NPN) Solid state switch F9P Relay, PLC 3 wire (PNP) 24V 12V

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Solid state auto switch Reed auto switch IC circuit 5 V, 12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90

15

30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 50 3 5.5 11 91 18.5 24.5 M20 x 1.5 116 18.5 12.5 31 134

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-90A/D-93A Direct Mounting Style . D-R73/D-R80 Direct Mounting Style. D-R73xC/D-R80xC Direct Mounting Style . 2-color Indication Type Reed Switch . D-A79W Rail Mounting Style . D-A59W Tie-rod Mounting Style . Solid State Switch. General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Lead wire length (m) 0.5 (Nil) Load voltage Auto switch models Indicator light Applicable loads Special function Type Electrical entry Wiring (output) Electrical entry direction 3 (L) AC DC Perpendicular In-line A90V A90 No 100V or less IC circuit 5V, 12V Relay, PLC 24V Reed switch Solid state switch 2 wire A93V A93 12V 100V Grommet Yes A96V A96 3 wire (NPN equiv.)

AC Servo Motor Driver (CC-Link Type)

If the system comprises of both CC-Link Ver.1.00and Ver.1.10-compliant cables, Ver.1.00 specifications are applied to the overall cable length and the cable length between stations. -75- 6.1 Station number setting Set the station number of each driver. Station number setting method Set the station number with the station number switches (STATION NO.) on the driver front.

AC Servo Motor Driver (CC-Link Type)

5.8.2 To Load saved Parameters . 65 5.9 Saving/Loading Project . 66 5.9.1 Saving Project . 66 5.9.2 To Load saved Project . 67 5.10 Saving/Loading Point table . 68 5.10.1 Saving Point table . 68 5.10.2 To Load saved Point table . 69 5.11 Acquisition of motion waveform with graph monitor . 70 5.11.1 Under the setting Tab: Setting of the items to display the graph . 71 5.11.2 Trigger wait . 75

Bore Size: 20mm, Stroke: 75mm

Bore Size: 20mm, Stroke: 75mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.