Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1, !2, and !9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

CM2

, #11 SCM225A, #11, #9 SCM225A, #11, #9, #19 CM2T32SCM232A, #11 SCM232A, #11, #9 SCM232A, #11, #9, #19 CM2T40SCM240A, #11 SCM240A, #11, #9 SCM240A, #11, #9, #19 1.4-46 Series CM2 Integrated Clevis (E) CM2E Bore size Stroke S T (mm) Bore E CD I A CI K AL CX L B1 D MM F N G PR H U H1 NA NN P 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13 5 8 28 18 20 5 15.5 12 12 8 M8 X 1.25 13 15 20 8

VFS

02 2 stations 6 For bottom ported, Rc 1/8 is only available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

HRX-OM-Q026

Sets SERIAL mode.2 (Operation and setting are performed by serial communication.) 1: When the contact input signal 1 is external switch signal, it is not possible to set to DIO mode. 2: When the serial protocol is simple communication protocol 2 and the contact input 1 is external switch signal or contact input 2 is remote signal, it is not possible to set to SERIAL mode.

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1, !2, and !9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Stopper Cylinder

#3 $4 $3 $5 #0 $1 $2 @5 @3 @4 @6 #1 $6 #7 #5 #6 #8 @7 #2 #4 Only one roller is provided for 32. $0 #9 RSQ RSQ Component Parts No.

XL

Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14) (actuation port [1]-(7) is released).

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

37-80A-10 SY3000-37-80A-6 SY3000-37-80A-12 SY3000-37-80A-9 For 1 to 8 stations 10-SS5YJ3SA 21 32 For 9 to 16 stations Pilot valve (V111) Adapter plate For 1 to 8 stations 20 41 42 43 Existing valve 10-SS5YJ5SA For 9 to 12 stations (Orange) Manual override For 13 to 16 stations + B A For 1 to 8 stations Interface 10-SS5Y7SA 21 41 For 9 to 12 stations For 13 to 16 stations Note 1) The above

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.