42

Note 5) Dust-tight/Water-jet-proof (IP65) is not available with interface regulator. 00 2500 2000 1500 1000 500 3000 Flow rate [L/min (ANR)] ARBQ5000-00-P (PRA) 0.6 0.7 Outlet pressure [MPa] 0.5 0.4 0.3 How to Order 0.2 Solenoid valve Interface regulator Regulating port 0.1 ARBQ5000-00-A-1 A 00 2500 2000 1500 1000 500 3000 VQ5l0l (Plug-in type) ARBQ5000-00-B-1 B Flow rate [L/min (ANR)] ARBQ5000

240

T4 = 0.2 [s] T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V 40 0.5 200 (0.067 + 0.067) 200 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

Modular F.R.L. Units

Flow rate [L/min (ANR)] 00 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] 0 0 AC60-B Rc1 AC55-B Rc1 AC50-B Rc1 0.6 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate

LEF-OM002xx

Move M Speed Position Accel Decel Pushing F TriggLV Pushing Sp Moving F Area1 Area2 In pos mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Absolute 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 Absolute 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

Ozone Resistant

430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

MY1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) Symbol Specifications 16 3000 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 -XB11 Long stroke 20, 25, 32, 40 50, 63 -XC18 NPT finish piping port 5000 -XC67 NBR rubber lining in dust seal band Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

Made to Order

16, 20, 50, 63, 80, 100 16, 20, 25, 32, 40, 50, 63 16, 20, 25, 32, 40, 50, 63 16, 20 16, 25, 40 16, 25, 40 MY1B 100 to 2000 16, 20, 25, 32 25 to 200 CXWL 2001 to 5000 (3000 for 16 only, 3000 for MY1MW) MY1M (W) 100 to 2000 10 to 75 10 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 2001 to 5000 (3000 for 16 only, 3000 for MY1CW) MY1C (W) 100 to 2000 CXSJ 10 to 100 15 MY1H MY2C MY2H/HT

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

SV

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com New Concept Connector Type Manifold 1-2-1 2 New Concept Connector Type Manifold Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Product is CE compliant with standard part number.

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

tTV2000/3000

, 3000 type) o None (for preset input) Analoo output 1 to sVDC 2 Switch outouvNPN outDut Nil Without bracket iF| Flat bracket ' c L-bracket .Available separately.

AZ1000

0.69 (17.5) Max. 5.0 (127.0) Max. 5.6 (142.2) (When selecting option code P) 1.5 (38.1) 2.25 (57.2) 2.00 (50.8) A 0.88 (22.4) Connections inch A (mm) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) FV4 MV4 FV6 MV6 TW6 3.70 (94.0) 4.70 (119.4) 2.96 (75.2) Flow Characteristics AZ1500 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) AZ1500 2000 to 3000

High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Manifold Regulator Modular Type ARM2500/3000 Series

Accessory (Pressure gauge) Body size None (With plug) Nil G1 G2 2500 3000 Back side thread: G33-1001 Vertical side thread: GA33-1001 Pressure gauges are shipped together (but not assembled).

HRX-OM-X071

Ambient temp. 7000 6000 25 25 6000 32 32 Cooling capacity[W] Cooling capacity[W] 5000 5000 40 40 4000 4000 3000 3000 2000 2000 1000 1000 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig 9-7 Cooling capacity (HRR050-A-20-) 9.4.2 HRR050-W-207000 7000 Facility water temp. 6000 6000 25 Cooling capacity[W] Cooling capacity[W] 5000 32

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

VZS

VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7. Part number for Screws and Gasket Assembly Precautions on ordering The interface gasket configuration between valve manifolds has been changed in line with the configuration changes of the valve interface.