HRX-OM-X084

1B 4 1 PT2 2B Blue 7 External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue

Proposals for Energy Saving

1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18

JXCx-OMU0004

ALARM 0 48 No.JXC-OMU0004-A 9.4 ) 1011 11 10 53 97 (1) NO.10 No.10 (2) NO.11 No.11 No.11 NO.11 (3) (1) 10 11 9 7 (2) 11 9 7 (3) 11 10 5 3 PLC I/O (1)NO.11 1No.11 (2) (3) 2 3 No.11 No.10 [1] OUT13 ONIN013 NO.11 NO.10 ON11 (1) OFF ON IN0 bit_0 [2] BUSY ONOUT13 IN1 ON OFF OFF bit_1 [3] BUSY ONIN013 IN2 ON OFF OFF IN2 [4] ALARM BUSY bit_2 OFF IN3 ON OFF [5] RESET bit

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

30 M8 x 1.25 x 6L 6 30 1 Z 2-6.9 through 2-11 counter bore depth 6.3 28 (Hexagon socket head set screw) 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2-M6 x 1 (Through-hole) M6 x 1 x 18.5L and M6 x 1 2-M5 x 0.8 Thread depth 7.5 (Hexagon bolt)(Hexagon nut) M6 x 1 x 14L (Hexagon socket head cap bolt) 2M5 x 0.8 thread depth 4.5 Note) (Opposite side: Same) (Z) 30 8M5 x 0.8 thread depth 7.5 (Opposite side

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder

10

MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19 31.5 43.5 1/4 11 106 5 10.5 24 168 63 M18 x 1.5 19 31.5 43.5 3/8 11 106 9 12 24 168 80 M22 x 1.5 23 38 56 3/8 21 132 11.5 14 40 208 100 M26 x 1.5 23 38 56 1/2 21 132 17 15 40 208 100 151 110 165 118 180 118 180 150 226 150 226 420 Air Cylinder: With End Lock

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

MXQ

H J K Q 1) MXQ8(L) M3 x 12 M8 x 1 MXQ-BS8(L) M3 x 12 20 7 24.5 14 12.5 40.8 5 12 1.4 16.6 8 12 14.6 MXQ12(L) M4 x 12 M8 x 1 MXQ-BS12(L) M4 x 12 18 9.5 29 14 11 40.8 6 12 1.4 20.5 11 13 18.5 MXQ16(L) M5 x 16 M10 x 1 MXQ-BS16(L) M5 x 16 22 11 36 17 13.5 46.7 7 14 1.4 23 13.5 16 21 MXQ20(L) M6 x 20 M14 x 1.5 MXQ-BS20(L) M6 x 18 35 13 46 22 17.5 67.3 11 19 12 27 17 22 25 MXQ25(L) M8 x 20 M14

VS 8-2/VS 8-4

VVQC1000-F26-1 VVQC1000-T0-1 VVQC1000-80A-D VVQC1000-74A-1 VVQC1000-L25-0-1 VVQC1000-L25-1-1 VVQC1000-L25-2-1 VVQC1000-M26-1 No.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

IDX-OM-W035

11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1 1 1 0 Y 5 L (Example) Series Manual override Connector kit VV5Q1208C6C-D1 setManifold base No. VQ1110-54 setsValve No. (Stations 1 to 3) VQ1210-54 setsValve No. (Stations 4 to 7) VVQ1000-10A-11 setBlank plate No.

Speed Controller with Indicator

Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

4/5 Port Air Operated Valve Series SYJA3000

For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5 M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust