Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Fluoropolymer Piping Equipment

Metric size Inch size Series Appearance Class 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 11/4" 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 1 2 3 4 5 6 Panel mount union LQ3P LVC P.924 LVA 1 2 3 4 5 6 7 LVH Union LQ3U LVD P.924 LVQ LVP Tubing O.D.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

17 13 6 6 5 M6 x 1 thread depth 11 M5 x 0.8 thread depth 9 8 8 6 6 8 6 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 9 7 12 10 M8 x 1.25 thread depth 14 M6 x 1 thread depth 11 22 8 Refer to page 714 for female thread dimensions. 715 Series CBM2 10-/1121-/2220, 25, 32, 40 Cylinder with End Lock (Head End Lock) How to Order Air Preparation Equipment Pressure Control Equipment Flow Control

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13 1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

For details, refer to pages 11 and 12. Table 1.

15

x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5.1 NM2 M4 x 12 2.5 10 12 Hexagon socket head cap screw/set screw Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 (for hub fixing)* 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 * For screw sizes, refer to the hub

Refrigerated Air Dryers Series IDF/IDU

35C 0.7 MPa IDFA15E Rc 1 120 152 168 IDFA22E R 1 182 231 254 IDFA37E R 11/2 273 347 382 R407C (HFC) IDFA55E 390 432 510 R 2 IDFA75E 660 720 822 59 INDEX 1.

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 2 Wiring example NPN JXC73 PNP JXC83 24 VDC BUSY1 24 VDC +COM3 Load Load 10 BUSY1 10 +COM3 1 1 Load Load BUSY2 30 BUSY2 30 +COM4 +COM4 21 21 Load Load BUSY3 11 BUSY3 11 N.C. 1 N.C. 1 2 2 Load Load BUSY4 31 BUSY4 31 N.C. 1 N.C. 1 22 22 Load Load AREA1 12 AREA1 12 N.C. 1 N.C. 1 Load Load AREA2 32 AREA2 32 3 3 Load Load AREA3 13 AREA3 13 N.C. 1 N.C. 1 23 23 Load Load

MY1

socket head taper plug) (mm) Bore size (mm) G 16 GB 24.5 NC 21 P PP 13 QQ 16 RR 19 SS 3.5 TT 15.5 UU 16 VV 16 WW 11 XX 38 ZZ Rc 1/16 25 32 40 Rc 1/8 19 30 26 Rc 1/8 18 16 24 4 21 16 19 13 48 Rc 1/16 23 36.5 32 Rc 1/4 16.5 26 25.5 10.5 22.5 24.5 23 20 54 Rc 1/8 "P" indicates a cylinder supply port.

CRQ2

Refer to page 11-1-29 for further information.

LEC-OM069xx

1 1 Outline 1.

Modular Design with Uniform Body Style

AC20A-D 1/8, 1/4 1/8 83.2 87.6 71.8 41.6 60 21 5 30 24 33 5.5 11.5 3.5 29 38 AC30A-D 1/4, 3/8 1/8 110.2 115.3 86.5 30 55.1 80 26.5 3.5 41 35 7 14 6 42.5 42.5 AC40A-D 1/4, 3/8, 1/2 1/8 145.2 147.1 91.5 38.4 72.6 110 35.5 50 40 55 9 18 7 50 65 AC40A-06-D 3/4 1/8 155.2 149.1 93 38.4 77.6 110 35.5 50 40 55 9 18 7 50 65 AC50A-D 3/4, 1 1/8 191.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Applicable Auto Switch Model

8 52 41 D-9 5 23 Reed switch D-A73C D-A80C 12 54 D-9lA 9 47 Reed switch 2 wire D-A79W 11 53 10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color

Base Mounted Metal Seal/Rubber Seal Series VQ

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 1 station { VQZ VV5Q11 2 stations { 17 16 15 14 2 1 D side U side 25 24 13 3 3 stations { VQD 23 18 12 4 1 2 3 Stations 26 22 21 20 19 4 stations { 11 5 10 9 8 7 6 5 stations { 6 stations { As the standard electrical wiring specifications, double wiring (connected to SOL.

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14