REA/REB

C D Note 2) Operating ranges are standards including hysteresis, and are not guaranteed.

VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Floating Joint

18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32

CY1

B Counter bore depth C 2 x 4-MM thread depth M 4-J x E (depth) H 2-P (piping port) Y T T HA CB L HP TC F X WP GW GP WS QW PW D 4-LD W K With switch rail Plug HS Q + Stroke G Z + Stroke HR CR Area E (Area E) For CY1R25, 32, 40, 50, 63 (mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

42

at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 Station 15 1 4/2 (P A/B) C [dm3/(sbar)] 5.9 5.9 5.9 5.9 b 0.23 0.23 0.23 0.23 Cv 1.5 1.5 1.5 1.5 VQ 1/2 2-position metal seal VQ4 1 250 VQ 4/5 VQ 4/5 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] 6.2 6.2 6.2 6.2 b 0.19 0.19 0.19 0.19 Cv 1.5 1.5 1.5 1.5 VQC 1/2 1 4/2 (P A/B) C [dm3

3 Port Air Operated Valve Series SYJA300

pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M3 x 0.5 M5 x 0.8 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted for internal pilot M5 x 0.8 0.31 0.33 0.32

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Thermo-chiller/Rack Mount Type

Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Cable length (L) [m] (30.7) (16.6) (23.7) Connector A1 (10.5) 1 1.5 3 3 5 5 8 8 (7.0) (12.7) (10.2) (5.6) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 A 10 (13.5) AB 1 3 B 15 1 2 (18) C 20 AB 15 16 Produced upon receipt of order (14.7) (30.7) (1 1) L (10) Connector B Connector D With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no.

CHKD/CHKG

CHKGL--XC64 A C C B 293

Modular F.R.L. Unit

AC40D C D E G 1 2 3 6 8 C J N R W Z AC10A AC25C AC60 AC40A AC40C AC20A Float type auto drain (N.C.)

0.4

Note 2) Metal seal only Note 3) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

SZ3000

Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing

Digital Gap Checker

ZS-31-C (Cable with connector) 23.5 5000 Pin no. Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no.

HRX-OM-X037

Offset temperature Sets offset temperature. -20.0 C to +20.0 C [By default] 0.0 C Selects the offset mode. [ ] Disabled OFF / 1 / 2 / 3 [By default] OFF [ ] MODE 1 (2) Offset Mode Offset mode [ ] MODE 2 [ ] MODE 3 About offset function This function controls the circulating fluid discharge temperature with offset.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2/4 (P A/B) 2/4 3/5 (A/B R1/R2) Standard: 0.4 W b Cv b Cv AC C [dm3/(sbar)] C [dm3/(sbar)] 10211021102110211021102110211021102110211021102110211021102110211021102110211021VQ1100 12 or less 0.72 0.70 0.25 0.15 0.18 29 or less 0.16 15 or less Metal seal 67 Single 2-position 3-position 2-position 3-position VQ1101 15 or less 1.0 0.85 0.30 0.20 0.25 34 or less 0.21 20 or less Rubber seal VQ1200

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2/4 (P A/B) 2/4 3/5 (A/B R1/R2) Standard: 0.4 W b Cv b Cv AC C [dm3/(sbar)] C [dm3/(sbar)] 10211021102110211021102110211021102110211021102110211021102110211021102110211021VQ1100 12 or less 0.72 0.70 0.25 0.15 0.18 29 or less 0.16 15 or less Metal seal 67 Single 2-position 3-position 2-position 3-position VQ1101 15 or less 1.0 0.85 0.30 0.20 0.25 34 or less 0.21 20 or less Rubber seal VQ1200