SMC Corporation of America
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Load at the end of lever + m a + K 3 a1 I = m 12 4a + b (Example) When the shape of m is a I = m + m 12 4a1 + b 5 2r sphere, refer to 7 above: w K = m 10. Gear transmission 5. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Through the center of gravity and perpendicular to the plate (also the same in case of a thicker Number of teeth = a plate) 1.

3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 38.7 P=25 65.5 VQ5 VQZ VQD Manual override Indicator light L2 48 L1 6.5 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 74.5 9 B B B B B 10 0.6 m, 1.5 m, 3 m Lead wire length n 1 2 3 4 5 6 7 Stations D-side 8 U-side

plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215

plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon Dioxide

exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 Instruct by specifying the valves and blanking plate assembly to be mounted on the

For a facility having a large installation area (that can vent the air naturally): Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level.

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

10-32 thread) 1/8MMV-44-22L (Figure 2) signifies a V type 1/8 NPT manifold fitting with two #4 branches and two #2 branches on each row with the second row to the right as viewed from the threaded end. 1 8 1 (Figure 1) 7 16 1 3 8 Typ. 13/16 1 4 1 4 1 8 5 16 5 16 5 16 1 8 1 4 1 4 5 16 3 8 1 8 35/64 7/16 17/32 7/16 Hex Typ. 7 16 75 1/8 M-111 or 1/8 M-222 1/8 M-3 1/8 MM-44222

Caution Warning In case of using a 5-port valve as a 3-port valve The JSY1000/3000/5000 series can be used as normally closed (N.C.) or normally open (N.O.) 3-port valves by closing one of the cylinder ports 4(A) or 2(B) with a plug. However, they should be used with the exhaust ports kept open. How to Use L/M Plug Connector 1.

M M M-03 03 03 03-3 3 3 3 0.1Nm 2 A B 1.7 ON OFF A B VQ1000 2 DC DC DC DC 2 ON OFF ON OFF 1.7 VQ20002 A B .

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

port) S070 Solenoid at A port side: VV3K3-S42Stations Built-in One-touch fitting: VV3K3-42Stations -C4, C6 VQ VKF VQZ (Pitch) VZ (A port) Manual override (Non-locking) VS 300 4-Rc 1/8 (Lead wire length) (P , R port) VFN (Lead wire length) 2-4.5 (Pitch) (Mounting hole) Manual override (Non-locking) 300 (Pitch) n-Rc 1/8 (Pitch) n-One-touch fitting C4: Applicable tubing T0425 C6: Applicable

7.3 D C B A PD port size Metric size: Rc1/8 Inch size: NPT1/8 Supply Port Dimensions [mm] Dimensions [mm] N C4 4.7 C6 4.7 N3 4.7 N7 7.3 A B C D E F ZHP63BM 26 45.8 63 68 12.5 33.8 ZHP80BM 28 57 80 85 18 41.8 ZHP63UM 26 63 66 5 20.3 ZHP80UM 26 80 83 5 20.3 Circuit Adapter Dimensions (by Mounting Style) [mm] G H J K L M ZHPmmmA-mmS 25.7 22.6 5 13 M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS