Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

VK3000

D LED R R NL Markings For AC, 12 VDC or less For 24 VDC or more + 1 2 1 2 1 2 NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister 1429

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)