Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Panel Mount Adapter, w/Flow Adjustment Valve, Calibration Certificate

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Series AP500

Code Delivery pressure Unit psig/bar MPa Code 1 V V No code MPA 10 15 30 5 to 100 psig (0.034 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Preset to 300 psig (2.1 MPa) 2) Pressure gauge unit MPa or psig/bar selectable.

Series AK1000

Material Code S, SH V V V V Gauge port (Extra bottom outlete, Inletr, Outlett) Ports B 2P 3P 4PL 5PC Pressure gauge unit 2) Pressure gauge 1) MPa unit Code Refer to the following porting configurations.

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: N2 (Supply: Latching Negative Common, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to

SL5200

) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: Calibration Certificate, Made to Order: -

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

Clean Gas Filter

Material Case Note 1 Stainless steel 316 Electrolytic polishing (Interior/Exterior) V-clamp 2 Stainless steel 304 Holder 1 3 Polyester Holder 2 4 Filter medium 5 Element PTFE Seal 6 FKM V-seal 7 300 SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type Flow Rate Characteristics Fluid: Compressed air Inlet temperature: 20C Dimensions SFA100/101, SFA200/201, SFA300/301 SFA10 Inlet

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

Stainless Steel Regulator Series NSR

Test data available upon request. 40-140'F (5 -60"C) Non relieving type (Standard), 'Relieving type (NSR1101, NSR1, NSR3101, NSR3111, NSR4101, NSR4111) only applicabl icr N2 gas or air HolIY TO ORDER F luid / Diaphrag m M aterinl a I allvt size M5-10-32Nom(t!