Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate), Made to Order: X731 (Compatible with Argon

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate), Made to Order: X731

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed

LEC-OM02704CN

() (15.3.2(3)) RY(n+2)6 RY(n2)7 1 RY(n+2)7 * (RXnC)OFF (RXnC)OFF(RY(n2)7)ON (RY(n2)7) (RY(n2)6),(PC35) 15 9 15 () 1 2 RY(n2)8PB29PB32 RY(n2)8 RY(n+2)8 (3.6.3) OFF RY(n+2)A (RYnARYnE) ON (RWwn4RWwn6) PC30()2 1 RY(n2)CRY(n2)DRY(n2)E18 RY(n2)C 2 RY(n2)D RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3

1

n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.

Compact 5-Port Solenoid Valve

C10: 10 (SMC) C12: 12 (SMC) L1 = 16 x n1 + 147 + 47 x n2 L2 = 16 x n1 + 53.5 L4 = L3 10.5 L5 = (L3 L1) / 2 L6 = 47 x n2 + 81.5 * These figures show the JJ5SY5-10S6Q22-05D-C12. * Refer to page 99 for dimensions of external pilot (Made to Order) and silencer. n1: Valve stations n2: I/O unit stations L3: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 2 3 4 5 6 7 8 9 10

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Fieldbus System

L1 = 10.5 x n1 + 135.5 + 47 x n2 L2 = 10.5 x n1 + 42 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 82 L3: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 185.5 198 210.5 223 223 235.5 248 260.5 273 285.5 285.5 298 310.5 323 335.5 348 348 360.5 373 385.5 398 410.5 423 235.5 248 248 260.5

MB

+ 30 (n2) n = 2, 4, 6, 8 70 + 50 (n2) n = 2, 4, 6, 8 75 + 30 (n2) n = 2, 4, 6, 8 80 + 30 (n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 75 + 50 (n2) n = 2, 4, 6, 8 80 + 50 (n2) n = 2, 4, 6, 8 85 + 50 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 90 + 50 (n2) n = 2, 4, 6, 8 90 n (Different sides) D-A44 n (Same side) 1 2 (Different sides or Same side) 1 70 75 80 85 105 80 110 115 115 60

Air Cylinder Series MB

2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 95 + 100 (n2) n = 2,4,6,8... 100 + 100 (n2) n = 2,4,6,8... 105 + 100 (n2) n = 2,4,6,8... 110 + 100 (n2) n = 2,4,6,8... 90 + 30 (n2) n = 2,4,6,8...

Electric Actuator with Integrated Guide

For the dimensions of the motor mounting position, refer to the dimensions on page 70 for the guidelines for assembly and designing. 80 46 (2 x n1)-6.6, Drill through 13, counter bore depth 6 5 thread depth 4 4-M2 x 0.4 Photo micro sensor 12 (Groove depth 1) E D Proximity sensor 7.5 Stroke + 96 (Table movement range) (25.5) 97.5 4.5 1 60 2 x n2-M2.6 x 0.45 4-C3 PCD3 56 8 4 5.8 3.3 thread

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) (Station 1) Light/surge voltage suppressor (Station n1) (Station 1) With option 60 45.5 37.5 10 74.5 (For DIN rail mounting) (7.5) 11.8 n1 = Valve stations n2 = Input block stations Individual EXH spacer Individual SUP spacer L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 L1: DIN rail overall length Valve stations (n1) 2 3

C85

C85RBF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B SW WH G1 EE EE G2 4-FF D D KK C ND K 3 N1 N2 FX NA NA AM F S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) F FX NA Bore AM FF KK ND h8 S C D EE G1 G2 H K N1 N2 SW WH ZZ 0 0.033 0 0.033 20 20 M5 x 0.8 depth 9 M8 x 1.25 8 28 30.4 22 30 6 24 76 13 10 106 20 G 1/8 22 8 29 15 26 25 M6 x 1 depth 11 M10 x 1.25 10

Series AP500

) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

CA2

) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4

Clean Regulator

Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure