Table of Contents regulator Series AWD AWD20 1/8, 1/4 AWD30 1/4, 3/8 0.01 m (95% filtered particle size) AWD40 1/4, 3/8, 1/2 Pages 14-2-82 to 14-2-85 14-2-66 67 Filter Regulator Series AW10 to 40 Integrated filter and regulator units save space and require less piping.
plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.
66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14
l Mounting orientation m m Refer to the caution notes below.
CHQB100 10D (M) CH QB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) x 195l 100 (M) 75D (M) 100D (M) M6 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 155l CH QB50 10D (M) 15D (M) 20D (M) 25D (M) 30D
Both Ends Tapped Style A B C D E H I J K L M O P S Q R Th9 U Z Bore size (mm) Stroke range (mm) M8 x 1.25 58.5 M6 x 1.0 12.5 10 31.5 14 0 0.052 (1) 125 to 200 250, 300 32 62.5 13 Rc 1/8 45.5 16 45 60 4.5 14 17 34 22 M8 x 1.25 66 M6 x 1.0 14 10 35 14 40 72 13 Rc 1/8 55 16 52 69 5 14 17 40 0 0.052 28 M10 x 1.5 80 M8 x 1.25 14 14 41 19 0 0.062 Note 1) For 125 to 200 stroke, strokes are by the
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (mm) Y 7 7 8 8.5 11 13 14 16 X 15 15 16 16.5 22 22
Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10
R 14 & 6mm tube for union M A L E Y: KQUD/KQ2UD 4 x 4mm R 14 UNION Y: KQUD/KQ2UD 4 x 4mm 6mm S T E M Y: KQX/KQ2X 2 x 6mm 8mm P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R S T E M Y: KQXD/KQ2XD 4 x 4mm 6mm B U L K H E A D U N I O N E L B O W: KQLE/KQ2LE 6mm Tube STEM MALE NIPPLE: KQN/KQ2N 6mm R 14 U N I O N B L A N
Standard (mm) W/o auto switch W/ auto switch Bore (mm) Stroke range (mm) A C D E H I J K1 K2 L M N O P Q S Th9 U Z A B B 0 0.052 0 0.062 0 0.062 40 28 5 to 50 13 16 52 M8 X 1.25 69 5 14 14 7 40 5.5 9 Depth 7 Rc(PT)1/8 14 66 35 14 54 64 50 40 50 35 10 to 50 56.5 40.5 66.5 50.5 Rc(PT)1/4 15 20 64 M10 X 1.5 86 7 18 17 8 50 6.6 11 Depth 8 14 80 41 19 63 35 58 42 68 52 103 14 Depth 10.5 Rc(PT)
L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.
14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14
14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104 50 18 16 M10 x 1.5 120 63 18 16 M10 x 1.5 120 80 21 19 M14 x 1.5 144 100 25 22 M16 x 1.5 147 D* When female thread is used, use a washer etc
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
regulator Series AWD AWD20 1/8, 1/4 AWD30 1/4, 3/8 0.01 m (95% filtered particle size) AWD40 1/4, 3/8, 1/2 Pages 14-2-82 to 14-2-85 14-2-66 67 Filter Regulator Series AW10 to 40 Integrated filter and regulator units save space and require less piping.
A B Effective area (mm2) Weight (g) M-5ALHN-4 M-5ALHU-3, -4 12 14 11.5 12.3 14.3 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 3.2 3.7 3.2 3.3 3.9 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 SM5B, #11 to #15 Kl M-5ALHN-6 M-5ALHU-6 Ml Hl Dl MS Hose nipple: M-5H-4, -6 Tl C D Part No.
(R)-L-02 M type plug connector (M): SY5140(R)-M-02 DIN terminal (D): SY5140(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 Max. 10 62.9 Pg.7 104.9 105.8 18 18 28 4.3 9.5 22 Grommet .SS5Y51, #1 + #4 L type plug connector .SS5Y51, #1 + #4 + #11 M type plug connector .SS5Y51, #1 + #4 + #14 27 Base Mounted Type SY3000/5000/7000/9000 Single valve A NA Features Precautions Note) [ ]: Values for
PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25 7.8.3
Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.