Pneumatic Purification

/4 115/1/60 1 NPT 232 R134a 17.7 21.3 19.9 3.3 8.3 82 PDE30-S 137 4.4 5.7 1 230/1/60 1 NPT 174 R134a 21.3 26.4 25 3.1 10.2 126 PDE40-S 137 5.1 6.5 1 1/4 230/1/60 1 1/4 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 168 PDE50-S 168 6.3 8.2 1 1/2 230/1/60 1 1/2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 207 PDE60-S 200 7.2 10.4 1 3/4 230/1/60 2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 227 PDE75-S 235 7.5 10.7

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N NPT 3/8 male Ports Code Ports 2P 2 ports Note) Only available with same type ttings inlet and outlet.

VCB

Orifice and Port Size Combinations Class Orifice size (mm) Port size 3 2 4 5 7 10 T Conduit terminal 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) Available types of electrical entry are either G, C and T.

ZFC Series

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

AMPSeries

4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Shuttle Valve/AND Valve with One-Touch Fittings

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

ISO Interface

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

COQ2BP

PhoeniX, AZ 85027 Tel : (602) 492-0908 FAX : (602) 492-9493 SMC Pneumatics Inc. (Tulsa) 1 0203 A East 61 st Street Tulsa, OK 74146 Tel : (918) 252-7820 FAX : (918) 252-951 1 SMC Pneumatics Inc. (Detroit) 44345 Macomb Induslnal Dr. Clinton Township, MI 48036 Tel : (810) 463-2300 FAX: (810) 463-2344 SMC Pneumatics Inc. (Charlotte) 5015-C West W .T. Harris Blvd.

Title not found

2 1/3 Accessory for IP6000 F For stroke 50~140 mm with lever unit Pressure Gauge (SUP, OUT1) 1 1/3 1 30 psi 2 45 psi 3 150 psi G Compensation spring (A) For IP6000, 6100 X15 Intrinsically safe Non-incendive IP6000, 6100 X15N Same, with Namur feedback shaft IP6100 1/6 1/6 Construction 0 No terminal box X83 Analog output potentiometer IP6100 1 With terminal box For IEC rating IP6100 X165 Same

Series DXT474

Side Thread Type Nil Rc G NPT NPTF T F F 1 2 3 4 N.O. N.C. N.O. N.C. N.O. N.C. N.C. N.O. Manifold Type 1 0 Side Ported Top Ported Rated Voltage, Elec.

P

ZR ZM Symbol 1 Pad dia. 02 to 08 ZH 2 10 to 16 3 20 to 32 4 40, 50 ZU ZL T 1 ZP A5 [qAdaptor] ZF ZP With Buffer ZCU Vacuum related T ZP 16 K20 A10 06 UGN [Pad model no.] Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [qAdaptor] Not used for 02 to 08 diameter.

Title not found

PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

AY Series

Aleignt should be ued. @ 690 kPa llOO p6i): 45ON tlOolbl with x-ht-2:1 optbn: gooN (2mtb) -5o: somm 11.97"1 Sr6ke 150: 150mm {5.905"1 Weiqhl -50: 4.6k9 ilo 2b) Weight 150: 5.2k9 111.3bl Max Presure: 1,7OOkP8 (25O psD 1 6 N E M d t h v e s E A D p | . d F i a .150N ( l00lbs xRAY-450-50 XRAY-450-50-POB i50N (l(l0lbst xRAY-450150 450N ( lOOlbs xRAY-450150-POB XRAY-450-50 Weld Spatter Covers

Corporation of America

Note 2) Values under the following conditions: Fluid: Water; Filtration: 20m; Pressure drop: 0.02MPa or less How To Order Installation Diagram FN1 1 0 1 N 10 S 020 Housing material 1 SUS304 Element type 0 Cylindrical type 1Note) Step type Pressure gauge Nil Without pressure gauge (with plug) GNote) G46-15-02 (wetted parts: Brass) Note) Only 5m of filtration is available.

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration

Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated. Cleaned for high purity semiconductor applications; Cleanroom assembled and Helium leaked tested; Valve meets dimensional requirements of SEMI F36-0299, Option 1; User-friendly forged body; Compact and lightweight

Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in air operated.

AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.

Pneumatics, Inc.

CHICAGO, IL (630) 393-0080 ATLANTA, GA (770) 624-1940 SAN FRANCISCO, CA (408) 943-9600 DALLAS, TX (972) 406-0082 INDIANAPOLIS, IN (317) 899-4743 MINNEAPOLIS, MN (651) 688-3490 PHOENIX, AZ (602) 492-0908 CINCINNATI, OH (606) 647-5600 AUSTIN, TX (512) 926-2646 ST.