DIGITAL FLOW SWITCH. FLOW SENSOR. 0.48500 lb. F23.

DIGITAL FLOW SWITCH. FLOW SENSOR. 0.48500 lb. F23.

Compact 5-Port Solenoid Valve

C6: 6 (SMC) (Station n) (Station 1) 0 BUS 13.6 9.1 D D B 2 1 59.9 3/5 E 3/5 60 B 2 B 2 B 2 B 2 E 2 P 1 PWR 25.8 23.9 A 4 A 4 A 4 A 4 A 4 1 P 3 S 13.2 8.9 (21) (7.5) (11.8) (For DIN rail mounting) 4 x M8 3-pin socket 2 x M12 M3 (Pitch) P = 9 23 11.5 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring L1 = 9 x n1 + 139 + 21 x n2 L2 = 9 x n1 + 43.4 L4 = L3 10.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B 2 B 2 B 2 B 2 49.9 30.6 E E 25.2 A 4 A 4 A 4 A 4 A 4 20.5 12 7.5 (Pitch) P = 16 One-touch fitting [4(A), 2(B) port] L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 47 x n2 + 81.5 17.5 20.5 Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Fieldbus System

A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 DIN rail clamping screw L1: DIN Rail Overall Length (mm) Valve stations I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Series SV

With external pilot specification (Pitch) 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 PE PE X x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, N1 4, N3 6, N7 One-touch fitting

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

SV

x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 198 223 248 260.5 285.5 310.5 323 348 373 223 235.5 260.5 285.5 298 323 348 360.5 385.5 235.5 260.5 273 298 323 335.5 360.5 385.5 398 248

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

0.4

fitting C8: 8 One-touch fitting L2 = L1 10.5 L3 = 16 x n1 + 73.8 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 57 L7 = 47 x n2 + 85.8 C10 [1(P) SUP port] (C12 in case of branch type) C10: 10 One-touch fitting (C12: 12 One-touch fitting) L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Scale: 40% (5.5) (35) Grommet (G) (11) 27 24.5 Mounting holes n-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings for 1/4" M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations 6.5 D side 2.3 2-M5 x 0.8 External pilot port 21.6 (Only external pilot port

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :