Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: [Rc (R)] Rc, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-

Vacuum

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Vacuum

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Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7

LEC-OM02904

PA09 RSP PB07 PG1 (2) 1 1 2 (No.PA09) 1 3 4 (No.PA080) 5 6 (3) (PB07) () r/min ) (r/min se) 262144(pul 60 (pulse) 6 12 7 7 . 2 7.1 . 2 7.2 . 2 7.3 . 5 7.4 . 7 7.5 . 11 7.6 . 11 7.6.1 . 11 7.6.2 . 12 7.6.3 . 13 7.6.4 . 15 7.7 2 . 17 7 1 7 7 6 () 7.1 No.PB16 No.PB23 PB01 PB16 PB23 No.PB01 0 0 0 M 1 1 1 2 2 1 1 2 7.2 (1) II() ( ) II()1002.25kHz 7 2 7 (2)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

C4, C6, C8, N3, N7, N9, MANIFOLD, 11-STA, VALVE, SS5Y5 MANIFOLD SY5000, WM, SS5Y5 BUILT IN FITTING >1/4, 2.45925 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings: C4, C6, C8, N3, N7, N9, MFLD ASSY 8-STA, VALVE, SS5Y5 MANIFOLD SY5000, WM, SS5Y5 BUILT IN FITTING >1/4, 1.80569 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings: C4, C6, C8, N3, N7, N9, MFLD ASSY, 2-STA, VALVE, SS5Y5 MANIFOLD SY5000, UM, SS5Y5 BUILT IN FITTING <1/4, 1.10231 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings: C4, C6, C8, N3, N7, N9, MFLD ASSY, 5-STA, VALVE, SS5Y5 MANIFOLD SY5000, WM, SS5Y5 BUILT IN FITTING >1/4, 1.65346 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings: C4, C6, C8, N3, N7, N9, MFLD ASSY, 10-STA, VALVE, SS5Y5 MANIFOLD SY5000, WM, SS5Y5 BUILT IN FITTING >1/4, 2.53531 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings: C4, C6, C8, N3, N7, N9, MFLD ASSY, 15-STA, VALVE, SS5Y5 MANIFOLD SY5000, WM, SS5Y5 BUILT IN FITTING >1/4, 1.69033 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port