Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

e-Rodless Actuator

How to Order Cam follower guide type E-MY2C 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

Air Cylinder

, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Made to Order

, 32, 40 25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

5

n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 D-F5l D-J5l D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 1 10 25 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n =

Electric Actuator/Slider Type

C L A B C L 25 32 63 25 32 63 Rod ange: LEY F Head ange: LEY G Head ange is not available for the LEY32/LEY63.

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc

Air Cylinder

60 74 8 90.4 74 46 46 71 Bore size Z 20 24 25 25 32 25 40 27 50 29 63 29 Head Trunnion (T) with Pivot Bracket TS Bracket mounting range B TH TT TW TY 4 x TF TV TX +0.10 0 TE ZZ + Stroke Z + Stroke Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z ZZ 20 38 10 5.5 25 28 3.2 35.8 42 16 28 93 (101) 114 (122) 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 98 (106) 119 (127)

Auto Switch Guide

(Including band and screw) RB Cylinder series Applicable bore size (mm) J 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 D-X Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Including band and screw) Cylinder series Applicable bore size (mm) 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEYG Series Guide rod type/ In-line motor type LEYGmD Series Size Pushing force [N] Stroke [mm] 25 485 Up to 400 32 588 Up to 500 63 3343 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 400 32 736 Up to 500 63 1910 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 588 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 736 659 LECYM/LECYU Series System Construction

15

LEF LEJ Component Parts LEL Quantity Size 25, 32 63 1 Motor flange 1 1 No.

MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.

MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.

Integrated Controller

Operate Integrated Controller / Rod Type EQYH Series EQY16, 25, 32 How to Order EQY 25 D H B 50 B 5 Size Motor mounting position/Motor cover direction Motor mounting position: In-line Motor type Lead [mm] 16 25 32 Symbol EQY16 EQY25 EQY32 H 20 24 A 10 12 16 B 5 6 8 C 2.5 3 4 H Battery-less absolute (Step motor 24 VDC) Symbol Motor cover direction1 Size D 25/32/40 D1 Left side 16 D2 Right

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

High Precision Type Rack & Pinion Style Series MSQ Size: 10, 20, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 MSQ A 10 A M9B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type MSQ B 10 A M9B Basic type Number of auto switches Nil S n 2 pcs.