CNA

(n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 90 + 50 n = 4, 8, 12, 16, 100 + 50 n = 4, 8, 12, 16, 110 + 50 n = 4, 8, 12, 16, 20 + 50 n = 2, 4, 6, 8, Different sides CLS D-B59W n 75 + 50 (n 2) n = 2, 3, 4, 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, Same side CLQ 15 90 100 110 35 75 80 90 100 1 Different sides MLGP 2 Same side 100 100 100

CNA

100 75 80 90 75 80 90 100 100 100 1 Different sides 2 20Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2

LJ1H

Refer to page 100 for part numbers. 73

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 With n pcs. (Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Lead 20: LEY32A Lead 16: LEY32DA 100 0 60 30 120 90 0 60 30 120 90 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 LEY63l (Motor mounting position: Top/Parallel, In-line

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

Possible to transfer a workpiece at low-speed.

Symbol: C14 Symbol: C15 Symbol: C16 The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 90 and 190.

TABLE OF CONTENTS

Durometer A (80-90) V (70-80) G (75-85) U (80-90) B (70-80) I (80-90) R (70-80) X (70-80) C (55-65) N (90-95) L (80-90) D (70-80) H (70-80) P (90-100) Property Acrylonitrile Fluoroelastomer G. N. Ethylene-Propylene Rubber Elastomer Oil Resistance Excellent Excellent Good up to Fails up to 225 F. up to 400 F. 225 F.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

Cylinder with Lock

2 (Different surfaces) 60 65 75 80 85 2 (Same surface) 90 95 100 105 110 D-G39 D-K39 D-A3m n (Different surfaces) 60 + 30 (n 2) (n = 2, 4, 6, 8)*1 65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

to 1000 3/4 +0.100 0 +0.3 +0.1 0 0.2 18.5 M16 x 1.5 80 M36 x 1.5 56 182 20 59 17 39 53 144 40 43 36 36 90 14 40 80 32 Up to 1200 -X 3/4 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M18 x 1.5 90 M40 x 1.5 63 60 204 162 23 45 70 48 20 41 39 44 17 50 100 40 Up to 1200 3/4 1 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M20 x 1.5 90 M45 x 1.5 63 60 226 182 25 50 74 48 20 46 39 44 17 Lube Non-lube 50 100 40 Up to

CL

125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.4-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 90 10 80 75 1 Replacement Dif. sides

C95

4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 10 10 60 65 65 75 80 85 1 100 100 90 95 95 100 105 110 2 (Same side) A3 2 (Different sides) 35 35 60 65 65 75 80 85 K3 n (Same side) 100 + 100 (n 2) 100 + 100 (n 2) 90 + 100 (n 2) 95 + 100 (n 2) 95 + 100 (n 2) 100 + 100 (n 2) 105 + 100 (n 2) 110

JIS Standard Hydraulic Cylinder

), 1 85 100 90 110 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 Note 2) 85 + 40 15 + 40 100 + 40 90 + 40 110 + 40 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 60 75 65 85 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 60 + 30 D-A9V Note 2) 15 + 30

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

Brake mechanism added

Same surface) 20 100 75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions