Slider Type Ball Screw Drive/11-LEFS Series

) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21 68 53.8 85.5 8 31 8 12.9 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9 ( ) depth 6 n x 6.6 7 76 150 B D x 150 (= E) 60 15 Motor cable (6) Motor option: With lock Lock cable (4.5) Encoder cable (7) (253.5) Dimensions [mm] Note 1) When mounting the actuator using the body mounting reference plane, set the

Modular F.R.L. Unit

95 C 7 10 14 18 20 24 24 B 67 97 129 165 169 245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb

Cylinder with Lock Series MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Modular F.R.L. Units

209.1 41.2 45 110 45 70 66 35 11 13 90 3.2 47 220.1 228.6 209.1 222.6 229.1 246.2 AL60-A 1 95 223.1 44.7 47.5 110 47.5 70 66 35 11 13 90 3.2 47 234.1 242.6 223.1 236.6 243.1 256.6 88 Semi-standard Specifications: 1000 cm3 Tank Lubricator AL30 to AL60 Symbol Available for previous models (AL30 to 60).

Environment

Nil Without cable H Without cable (Connector only) 1 1.5 Applicable Stroke Table : Standard Stroke [mm] Manufacturable 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 stroke range Model [mm] LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * When the driver type is selected, the cable is included. Select cable type and cable length.

LEC-OM07605CN

(3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

CRB2/CRBU2/CRB1

Weights (g) Vane type CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (Size) 180 180 180 180 180 270 90 270 90 270 90 270 270 Rotation Single vane Double vane 47.1 72 142 258 480 140 469 47.5 47 73 72 143 263 255 491 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 30 50 60 46.5 30 47 90 150 203 Rotation 90 90 90 90 90 100 100 100 100 100 Body of rotary actuator

Table of Contents

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 180 270 180 270 270 90 270 90 180 270 90 180 Rotating angle Single vane Double vane 469 47.1 47.5 258 255 491 480 47 73 72 72 143 142 140 263 Body of rotary actuator Auto switch unit + 2 switches 30 60 46.5 50 30 Angle adjuster 30 150 203 47 90 90 90 100 90 100 100 100 90 100 90 Rotating angle 158 308

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

CE

to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

Special Specifications:

Discontinued Products and Equivalent Products Discontinued Product equivalent External dimension of a product Width x Depth x Height 76 x 76 x 178 122 x 122 x 259 160 x 160 x 311 220 x 220 x 461 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 (210) 122 x 122 x 259 160 x 160 x 311 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 152

CE

to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

Stroke Reading Cylinder and Counter

175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 50 L1 0 2 4 6 8 10 Transfer load m (kg) 150 L2 100 Mer m 50 L2 0 2 4 6 8 10 Mer Transfer load m (kg) m a = 500 150 a = 1000 100 a = 2000 L3 50 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 90 Standard Motor/Horizontal

Table of Contents

Use to branch line from female thread in both 90 directions. Use to change size of One-touch fittings. P. 19 Union Y Bulkhead male elbow Union tee Use to connect tubes through a panel, changing by 90 in a tube fetching direction. KQ2U KQ2LE KQ2T P. 22 P. 21 Use to connect tubes in both 90 directions. Use to branch line in the same direction.