Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 8-30-57 58 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Table of Contents

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3 1 Air Suction Filter

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

SV

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

SL5200

200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 BMB2 -032 BMB2 -040 MDB 7-9-41 42 Technical Data 2: How to Mount and Move the Auto Switch Mounting

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

08-cs1w-e

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction @8 @0 @4 @2 @3@5@1 @6 @7 Lube, non-lube with auto switch Non-lube type With auto switch @2 @3 @3 @3 #1 180, 200 Steel tube 125 to 160 Aluminum tube Air-hydro @8 @0 @4 @2 @3@5 @6 @7 @3 @3 Aluminum tube Auto switch The numbers

A

180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14 ANA1-01~06 ANB1-01

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

160 2.4 0.62 0.45 0.15 0.13 0.15 0.4 JSX11-S Cm201 160 160 1/8 3.2 1.35 0.48 0.35 0.30 0.35 0.7 JSX21-S Cm301 320 330 * The list shows the compatibility between general fluids and the seal materials.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

VZ100/300/500

9 160 152 6 112 104 7 128 120 8 144 136 5 96 88 2 48 40 3 64 56 4 80 72 L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor

Power Clamp Cylinder

W Fulcrum L 189 Model Selection 3 Clamp arm 40 8.0 200 180 7.0 Distance from pivot point (inches) 160 Distance from pivot point (mm) 6.0 140 5.0 120 4.0 100 80 3.0 60 2.0 40 1.0 20 0 0 0 1 2 3 4 5 6 7 0 5 10 15 20 25 30 Load capacity (N) Load capacity (pounds) 50 6.0 200 5.5 180 Distance from pivot point (inches) Distance from pivot point (mm) 5.0 160 4.5 4.0 140 3.5 120 3.0 100 2.5 2.0 0

ZP

50 0 to 100 X X X X Conductive NBR 50 10 to 200 X X X X X Conductive silicon rubber The above table covers only general characteristics of subject rubber materials.

AC

Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.

MG

MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) 50 st 75 to 200 st 250 to 400 st 250 to 400 st 75 to 200 st 50 st 75 to 200 st 250 to 400 st 75 to 200 st 250 to 400 st 50 st 50 st 80 100 168.5 80 100 193 71.5 160 193 25 47 38.5 71.5 167 142 30 45.5 20.5 203 62 178.5 180 203 30 37.5 39 62 187 162 36 46 21