Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 !6 !7 !8 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 5) [ ]: Denotes normal position.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

CP95

CN R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2

CP95

5 !9 i *1 *1 C95K32 A A-A A !2 !

JXCx-OMT0028CN

(OUT Data) GW bit 7 6 5 4 3 2 1 0 Address 250 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 253 (1) (GW [IN Data] Address.250, bit1-0) 250 bit1 Bit0 0 0 0 1 1 0 (2) 0(OFF)1(ON) [OUT 250.7]1(ON)CN2SW ON (3) 0(OFF)1(ON) (GW [OUT Data] Address.250, bit7)]1(ON)(CN2SW)ON (4) 0(OFF)1(ON)LEC 1(ON)0(OFF) (5)() ID ON(1)ID OFF(0) bit 7 6 5 4 3 2 1 0 Address 251 ID8 ID7 ID6

energy saving effect

Cooling Capacity HRSH300-A-20/4035 Ambient temperature 32C 30 Ambient temperature 43C 28 Cooling capacity [kW] 25 HRS 20 Ambient temperature 45C HRS 090 15 10 HRS 100/150 5 HRSH 090 5 10 15 20 25 30 35 0 HRSH HRSH Circulating fluid temperature [C] HRSE Pump Capacity HRZ HRSH100-A-20/40HRSH100-W-20/40HRSH150/200-A-20/40HRSH150/200/250-W-20/40HRZD HRW 0.6 0.6 60 60 Circulating fluid pressure

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

High Power Cylinder Series RHC

23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95

VQZ1000/2000/3000

237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How to Order Double check block 2 position 3 position/exhaust center VQ1000-FPGC4 M5 F Option 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) None Nil DIN rail mount style (For manifold) D IN side port size OUT side port size F With bracket Name plate

CL

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CL

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