C95

70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110 120 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120

IIIIIIIIII

PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

IDG

fitting for purge air discharge Flow direction (Right Left) Nil P R Outlet air flow rate Purge air flow rate (l/min(ANR)) Size 60 75 100 50/27 100/54 150/85 Note) In the case of two or more options, indicate them alphabetically.

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 1018 Booster Regulator VBA Series Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 ARJ Silencer (Option) 113 113 IN port 1/4 IN port 1/4 OUT port 1/4 AR425 to 935 23 27 23 27 OUT port 1/4 ARX 22 22 60 4 x 5.5 EXH port 1

LEY-OM007

200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98

Air Cylinder Series MB

177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 70, 75, 80, 90, 100 30 10 16 20 25 30 35 40 45 50 60 70 80 75 90 100 10 15 20 25 30 35 40 45 50 60 70 80 75 90 100 Model CXS20 CXS25 CXS32 170 160 150 145 140 130 120 115 110 105 100 95 90 85 80 194 184 174 169 164 154 144 139 134 129 124 119 114 109 104 60 40 172 162 152 147 142 132 122 117 112 107 102 97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182

JA/JAH/JB/JS

JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96 1.25 2 2 2.5 3 3 15 18 21 24 29 29 1.25 2.5 2.8 5.2 9 9.3 9000 14000 22000 36000 55000 55000 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32

JA/JAH/JB/JS

JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96 1.25 2 2 2.5 3 3 15 18 21 24 29 29 1.25 2.5 2.8 5.2 9 9.3 9000 14000 22000 36000 55000 55000 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32

REC

45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

Series AK1000

300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig

HRL

Polyester band Hanging position Cardboard box 60 or less Forklift insertion side Forklift insertion side Less than 150 mm Wooden skid Less than 150 mm Forklift insertion side Weights and Dimensions When Packaged Model Weight [kg] Dimensions [mm] HRL100-A-20 300 Height 2020 x Width 1200 x Depth 893 HRL200-A-20 327 Forklift insertion side HRL200-A-20 4.

Guide Cylinder Series MGG

, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

Thermo-chiller

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

AZ1000

V3 V3 MPA MPA 1 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Specifications AZ1001 AZ1002 AZ1006 AZ1015 AZ1010 Operating Parameters 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300

MHZ

20 150 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 10 50 0 10 20 30 40 50 60 0 50 100 150 200 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 20 10 0 20 40 60 80 Gripping point L (mm) 12-2-5 5 Series MHZ Model Selection Effective Gripping

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.