Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5 27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130

SMC

6 35 1 x F 2 4H9 depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130

CP95

10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60

CP95

50 26 32 10 4.5 144 142 32 9.5 7 64 79 40 36 20 10 145 12 15 160 28 55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Dimensions/LJ1S202SC Scale: 10% When two dimensions are shown, the top dimension is for 100 to 600mm stokes, and the bottom dimension is for 700 to 1200mm strokes. 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 140 184 176 Z section detail 52 52.5 169 18 22 175

MXS Series Air Slide Table

70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175

5 Port Solenoid Valve SY Series

Single 2 position 125 167 2 position 0.23 0.93 4.1 3.3 0.33 0.81 0.61 0.44 0.16 0.64 0.45 0.18 Double Double Closed center Closed 0.48 0.13 0.46 0.43 0.13 0.47 2.9 0.63 0.31 0.38 0.70 2.4 SY320 --M5 SY720 --02 center 1 4 M5 x 0.8 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3.4 (2.1) 0.35 (0.38) 0.82 (0.54) Exhaust center Exhaust 3 position 3 position 0.39 0.65 2.5 0.47 0.42 0.13 71 76 84 128 133 175

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button

V

175 Air Consumption S Type 26 (660) V A C U U M P R E S S U R E 95 130 175 SCFM (ln/min) L Type 16 (400) V A C U U M P O R T S 660mm Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

MXS

0.8 thread 10 deep 4H9 3.5 deep +0.030 0 HA GA Cross section AA Cross section BB With auto switch Basic style MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 VWith stroke adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7) (mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 4 A 4 A 4 A 4 A 41 E 3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 5 173 162.5 138 17.5 6 173 162.5 148.5 12.5 7 185.5 175

2/3 Port Valve

150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 VNC5-32F VNC6-40F VNC7-50F 100 105 120 36 42 54 12 12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

Series SV

IP65 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 185.5 173 160.5 148 135.5 123 110.5 98 Rail length L1 175 162.5 150 137.5 125 112.5 100 87.5 Mounting pitch L2 158 146 134 122 110 98 86 74 Manifold length L3 13.5 13.5 13 13 12.5 12.5 12 12 L4 Input block (M12) only (Pitch) P = 20

0.4

.: 3.2, 1/8" 4, 5/32" 6, 1/4" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 L2 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2 219.7 230.2 240.7 251.2 L3 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 L4 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5

0.4

185.5 196 206.5 217 227.5 238 248.5 259 125 137.5 150 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 135.5 148 160.5 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 408 Base Mounted Plug-in Manifold VQ1000/2000 Series VV5Q21 SV L4 L4 SYJ L3 (5.25) L3 L2 Applicable connector: Flat ribbon cable connector (20P) (Complies with MIL-C-83503) L2 SZ L1 6.5 34.5

MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CLA

111 13 17 I M 26X t.5 Wtthout boot PG H ZZ o. 42 11 20 45 153 8 60 9 12 SO 42 100 51 215 52 \Bore size MM PH PL PW S W FV eFO FT FX FY FZ ) (mm) XI US N P t 40 "I ,~20 27 " 1 50 30 % 46 10 2' 50 168 a 70 9 12 90 50 110 58 237 58 48.5 13 23 60 182 0 86 i-11 .5 15 105 59 130 58 25 ; 58 55 15 23 70 208 0 102113.5 18 130 76 160 71 296 80 f 63 :y ~ . 16 31 % Slroke ~ 65 21.5 80 305 80 37 " 1 100

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06