7ND9071en

Linearization can be done with 3 points (and end points) or with 9 points (and end points). 3-point linearization will be done in positions 25 %, 50 % and 75 %. 9-point linearization will be done in positions 10 %, 20 %, 30 %, 40 %, 50 %, 60 %, 70 %, 80 % and 90 %.

Modular F.R.L. Unit

2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11

7

Note 2) Only available for clevis width A (16.5 mm) Thread type 40 50 63 40 mm 50 mm 63 mm Nil TN TF Rc1/4 NPT1/4 G1/4 None End bracket Nil Single knuckle joint (M6 without tap) Single knuckle joint (M6 with tap) Double knuckle joint (M6 without tap) Double knuckle joint (M6 with tap) I IA Y YA Cylinder stroke (mm) 40 50 63 50, 75, 100, 125, 150 50, 75, 100, 125, 150, 200 50, 75, 100, 125

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

ZPT/ZPX

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121

ZP

19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C ZPT 10-B-A14 44.5 109.5 111 112 45.5 110.5 114.5 50 54.5 113.5 116.5 117.5 55.5 5 10 6.2 13 65.5 124.5 64.5 123.5 126.5 127.5 85.5 75 169.5 84.5 168.5 171.5 172.5

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With connector cable Note 1) W 50 60 4 220 VAC Hz [230 VAC Hz] 50 60 50 60 For type W, DC voltage is only available.

MQQ

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

LJ1H

Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

•

WOO 50 47 157 128 32 71 <:l 15 M14 x 1.5 15 I 17 15 27 13 M30 )( 1.5 30.5 160 3510 1200 56 53 177 144 38 785 42 18 M16 x 1.5 15 20 17 34 15 M36)(1.5 34.5 (mm) P R S I TO IT TX I TV TZ With rod boot e f h t Z, ZZ, Without rod boot H Z ZZ Bore se (mm) 1/2 1 98 32 1:. = 50 170 164 234 110 159 221 75 40 133 Vs stroke 182 244 125 lIZ 1.5 98 I 36 : 55 190 I 184 262 110 159 221 . 140 75 40 133 Ys

Free Mount Cylinder

65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Brake mechanism added

55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different

39

6Hexagon socket head cap screw wStopper bolt @1Seal washer rBumper @2Bumper stopper 50 CKZ3N-S050W Note 1) 63 CKZ3N-S063W Note 1) Table 1 50 CKZ3N-B050 Note 2) Opening angle Code J H G F E D C B A Stopper bolt kits 15 30 45 60 75 90 105 120 135 63 CKZ3N-B063 Note 2) tRubber cover !7Spacer !8Short head cap screw 50 CKZ2N-T050 63 CKZ2N-T063 Top cover kits 50 yMetal cover !