MGC , 200 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y
CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series
See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-
See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-
For details, refer to page 3-8-95. Body type Plug-in type Non plug-in type With serial interface unit for serial transmission Plug-in type Solenoid valve wiring process reduced considerably. Disperse installation possible. Manifold solenoid valve: 8 stations max. 32 positions (512 solenoids). Maintenance and inspection are easy. VVFS5000-22A-2 Part no.
Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.
65 85 95 165 1722 785 384 993 384 785 993 1722 Caution Be sure to read before handling.
C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.
, 200, 250, 300 10 RHC 150, 200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)
kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).
, 200, 250, 300 10 RHC 150, 200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4
600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150
, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.
95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175 100 (M) 10 (M) 60 M12 x 85l x 60l 85 CHKGB63 5 (M) 15 (M) 65 x 90l x 70l 90 10 (M) 20 (M) 70 x 95l x 75l 95 15 (M) 25 (M) 75 10.4 x 100l x 80l 100 20 (M) 30 (M) 80 x 105l x 85l 105 25 (M) 35 (M) 85 x 110l x 90l 110 30 (M) 40 (M) 90 16 x 115l x 95l 115 35 (M) 45 (M) 95 x 120l x 100l 120 40
40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 80 391 13 47 3/4 236
JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200
VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller