3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

If the manual override is turned by 180 counterclockwise and mark is adjusted to 0, locking will be released and the manual override will return.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6:

JIS Standard Hydraulic Cylinder

Auto switch model Cylinder model Bore size (mm) 80 63 50 40 32 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Note 2) BA7-063 BA7-063 BA7-080 BS5-160 BS5-180 CH2E/H/F D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 The figure shows how auto switch models, D-M9(V), M9W(V), and M9A(V) are mounted.

Table of Contents

If the manual override is turned by 180 clockwise and the mark is adjusted to A, then pushed in the direction of an arrow (), it will be back to the reset condition. (passage P A) If the manual override is turned by 180 counterclockwise and the mark is adjusted to B, then pushed in the direction of an arrow (), it will be back to the reset condition.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

260.5 14 234 244 275 285.5 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 L1 L2 L3 L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size (35) (5.5) 2-4.5 Mounting holes 42 (11) Grommet

Series VQ Base Mounted Metal Seal/Rubber Seal

175 185.5 4 114 187.5 198 5 124.5 187.5 198 6 135 200 210.5 7 145.5 212.5 223 8 156 225 235.5 9 166.5 237.5 248 12 198 262.5 273 13 208.5 275 285.5 14 219 287.5 298 15 229.5 300 310.5 16 240 312.5 323 10 177 250 260.5 11 187.5 250 260.5 L1 L2 L3 1.10-181 VQ0/1000 Kit (Connector) C Standard with lead wires plug-connected to each valve individually.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 20 10 5 1 20 10 5 (2) Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 90 180 360 629 90 180 360 Home position return/JOG operation Accelerationeration/D eceleration time constants (msec) PE07

AC Servo Motor Driver (CC-Link Type)

143 1000 500 250 Different from the initial value. *5.

0.4

.: 3.2, 1/8" 4, 5/32" 6, 1/4" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 L2 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2 219.7 230.2 240.7 251.2 L3 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 L4 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5

SV

L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 5 173 162.5 138 17.5 6 173 162.5 148.5 12.5 7 185.5 175 159 13.5 8 198 187.5 169.5 14.5 9 210.5 200 180 15.5 10 223 212.5 190.5 16.5 11 235.5 225 201 17.5 12 235.5 225 211.5 12 13 248 237.5 222 13 14 260.5 250 232.5 14 15 273 262.5 243 15 16 285.5 275 253.5 16 L1 L2 L3 L4 1-2-29 26 Series SV Dimensions

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500,

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Air Tank Series AT 1

M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

A

180 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temp 5~60C / 40~140F Bowl Polycarbonate Flows are for 0.7MPa Supply, 0.01MPa Pressure Drop Model A B C Pipe Size Model A B C Pipe Size (N)AF811 150 439 33 112, 114 (N)AF800 150 410 33 112, 114 (N)AF911 200 519 46 2 (N)AF900 200 488 46 2 H O W T O O R D E R A I R F I LT E R (N)AF800-12 (1 14) (N)AF800-14 (1 12) (N)AF900-20 (2) H O W

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 L1 L2 L3 L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Speed (mm/s) 250 3.5 2.3 1.5 1.2 1.1 500 2.4 1.8 1.4 1.2 1.1 Values will vary slightly depending on the operating conditions. A B C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS63S-300656.5 696.5 306 370 6 1 200 180 11-LEJS63S-400756.5 796.5 406 470 8 2 400 80 11-LEJS63S-500856.5 896.5 506 570 8 2 400 180 11-LEJS63S-600956.5 996.5 606 670 10 3 600 80 11-LEJS63S-7001056.5 1096.5 706 770 10 3 600 180 11-LEJS63S-8001156.5 1196.5 806 870 12 4 800 80 11-LEJS63S-9001256.5 1296.5 906 970 12 4 800 180 11-LEJS63S-10001356.5

High Power Cylinder Series RHC

to 1000 Effective thread length 32 50 70 35 50 0.042 0 250 to 1000 32 63 104 84 15 11 10 23 58 20 60 80 35 55 0.074 0 250 to 1000 37 80 130 106 18 13 10 23 61 25 75 95 40 65 0.074 0 250 to 1000 37 100 145 120 20 13 10 25 63 30 90 116 40 80 0.074 ZZ WH 305 S 6.8 to 11.3 H1 58 P 215 H 11 NF 1/2 GA 80 NE 24 FZ 16 ND 25 FY 116 MM 27.7 K M18 x 1.5 JC 7 I 75 Bore size (mm) 50 53 305 215 11 1/2