ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

HRL

Polyester band Hanging position Cardboard box 60 or less Forklift insertion side Forklift insertion side Less than 150 mm Wooden skid Less than 150 mm Forklift insertion side Weights and Dimensions When Packaged Model Weight [kg] Dimensions [mm] HRL100-A-20 300 Height 2020 x Width 1200 x Depth 893 HRL200-A-20 327 Forklift insertion side HRL200-A-20 4.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Modular F.R.L. Units

147.1 18 35.5 38.4 40 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 155.6 153.9 149.6 154.1 169.6 174.1 AF40-06-A 3/4 75 149.1 20 35.5 38.4 40 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 157.6 155.9 151.6 156.1 171.6 176.1 AF50-A 3/4, 1 90 220.1 24 45 30 45 70 66 35 11 13 90 3.2 47 259.9 228.6 226.9 222.6 227.1 242.6 247.1 AF60-A 1 95 234.1 24 47.5 30 47.5 70 66 35 11 13 90 3.2 47 273.9 242.6 240.9

ZP

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Symbol/Type Heavy-duty Pad H: Heavy-duty (Flat with rib) HT: Heavy-duty (Thin flat with rib) Pad diameter 32, 150, 250

Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

Slider Type Ball Screw Drive/11-LEFS Series

Rc1/8 14.9 7.5 11LEFS 11LEFS +0.030 0 5H9 ( ) depth 5 11LEJS n x 5.5 6 25A60 LEC 150 B D x 150 (= E) 15 15 LEC S LEC SS-T LEC Y Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Refer to pages 166 and 167 for external pilot specifications and built-in silencer. 150 Base Mounted 10-SY3000/5000 Type 45 Note) AC-type models that are CE-compliant have DIN terminals only.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

100

60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(122) L (62) A (Table traveling distance)2 10 62 55 64 [(66)]4 (66) [64]4 Stroke 70 [Origin]4 2 [(4)]4 (4) [2]4 Origin3 (59.9) (8.5) 48 (59.9) (63) 30 Auto switch groove5 M4 x 0.7 thread depth 8 (F.G. terminal) 6.5 46.8 63 (1 row per side) 7.5 15 B D x 150 (= E) 15 5H9 (+0.030 +0 ) depth 56 150 n x 5.5 Motor mounting position: Right side parallel Motor mounting position: Left side parallel

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.