High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

stroke end) and its mounting height Operating range Auto switch mounting brackets/Part no. 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Note 1) Intermediate strokes not listed above are produced upon receipt of order.

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

0.4

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

100

70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow

CC

Through the availability of a wide range of series in terms of converter capacity and valve unit flow rate control capability, speed as high as 200 mm/s (throttle valve) can be achieved with a 80 cylinder.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

VFS

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

Tie-rod Type Hydraulic Cylinder

80 60 22.4 30 11 17 17 M10 x 1.5 22 20 25 M18 x 1.5 30 3/8 12 102 60 122 80 80 26 65 M12 x 1.75 32 8 100 100 75 28 32 13 22 20 26 26 29 M22 x 1.5 35 1/2 12 130 75 155 90 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 13 27 19 27 26 34 35 1/2 16 145 90 172 100 125 34 80 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 15 27 19 27 30 34 35 1/2 18 170 112 200 100 160 43 100 M16 x 2 M33 x

ISO Standard Hydraulic Cylinder

25 to 800 96 93 M33 x 2 57 32 M10 x 1.25 20 13 45 45 41 75 60 42 133 30 17 32 1/2 74 29 41 17 80 113 +0.052 0 100 25 to 1000 115 M42 x 2 58 42 M14 x 1.5 28 16 56 56 50 90 72 38 146 40 22 39 3/4 86 34 52 19 97 Bore size (mm) V Y ZZ W SS 40 6.5 11.5 58 190 151 50 8 11.5 65 203 158 63 12 17.5 69 250 185 80 15 17.5 77 274 200 100 15 21.5 79 316 226 Rod trunnion: CHSDTA Z + Stroke PJ + Stroke

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series AK1000

psig (0.55 MPa) 20 psig (0.14 MPa) AK1500 3000 psig (20.7 MPa) 200 psig (1.4 MPa) Inlet pressure: 50 0.34 100 0.69 90 0.62 40 0.28 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 30 0.21 60 0.41 50 0.34 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate

HRX-OM-Q026

17: Pump capacity (HRSH150/200-A-20/40-HRSH150/200/250-W-20/40-) 8.5 Pump Capacity HRSH Series 8-18 HRX-OM-Q026 Chapter 8 Documents 8.5.3 HRSH250/300-A-20/400.9 90 0.8 80 Circulating fluid outlet 0.7 70 Lifting head [m] Pressure [MPa] 0.6 60 Usable flow rate range 0.5 50 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow [L/min

Rotary Table/

350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16 MY2HT16 MY2HT16 3 3 3 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000