MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Adsorption Plate

Adsorption surface size SP2130 SP2230 SP2330 SP2430 SP2530 SP2630 50 x 50 40 10 100 x 100 80 10 P1 150 x 150 105 10 P1 200 x 200 130 10 250 x 250 155 10 P2 P2 300 x 300 180 10 Special Order Products Products with a stainless steel body or in other shapes can be manufactured. Consult SMC separately.

Air Cylinder

to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6 x 1 89 122 114 147 139 172 164 197 40 13 21 M8 x 1.25 113 150 138 175 163 200 188 225 213 250 Symbol * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the

VQZ1000/2000/3000

1 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ1000/2000/3000 Compact design with large flow capacity VQC SQ Model Flow characteristics Cylinder size VQ0 Manifold pitch (mm) Metal seal C [dm3/(sbar)] Rubber seal C [dm3/(sbar)] Up to 50 Up to 80 Up to 100 VQ4 VQZ1000 10 15 18 0.54 1.4 2.4 0.71 1.6 3.2 VQZ2000 VQ5 VQZ3000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

Series AP500

psig (0.55 MPa) 20 psig (0.14 MPa) AP1500 50 0.34 0.69 100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes

JIS Standard Hydraulic Cylinder

0.043 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 25 22 7 14 55 250 M16 x 1.5 18 +0.052 0 0.025 0.064 0.020 0.053 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 9 19 60 280 M20 x 1.5 22.4 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 11 24 70 327.5 M24 x 1.5 28 0.030 0.076 +0.062 0 0.025 0.064 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 13 30 80 367.5 M30

CM2

80 81 86 78.5 78.5 79.5 83.5 76.5 76.5 77.5 81.5 151 to 200 101 106 107 112 104 109 100.5 105.5 106 111 104.5 109.5 102.5 107.5 200 to 250 131 137 134 130.5 136 134.5 132.5 25.5 28 31.5 35.5 22.5 25 28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 1 1 2 7 7 7 8 13 4 4 5 10 0.5 0.5 1.5 6.5 6 6 7 12 4.5 4.5 5.5 10.5 2.5 2.5 3.5 8.5 20 25 32 40 20 25 32 40 20 25 32 40 20

energy saving effect

Page 179 165 A Thermo-chiller Air-cooled 200 V Type Inverter Type (UL Standards) RoHS HRSH Series How to Order A 20 HRSH 250 Cooling capacity Option 100 10.5 kW 150 15.7 kW 200 20.5 kW 250 25 kW 300 28 kW Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note 1) With fluid fill port S Note 2) Conforming to CE/UL standards Cooling

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Series AK1000

0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure

Table of Contents

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Best Pneumatics Vol. 14

124 AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B S V T SV TV L3 57 74 74 95 102 Attachment Model L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06

Series VQ Metal Seal/Rubber Seal Body Ported

Dimensions (mm) Equation L1=10.5n+14.5, L2=10.5n+25 n: Station (Max.16) n L 1 2 46 56.5 225 235.5 6 88 98.5 262.5 273 3 56.5 67 237.5 248 7 98.5 109 275 285.5 4 67 77.5 250 260.5 8 109 119.5 287.5 298 5 77.5 88 250 260.5 9 119.5 130 300 310.5 10 130 140.5 312.5 323 14 172 182.5 350 360.5 11 140.5 151 312.5 323 15 182.5 193 362.5 373 12 151 161.5 325 335.5 16 13 161.5 172 337.5 348 L1 L2 L3

Modular F.R.L. Unit

G 30 41 41 50 50 H 24 35 35 40 40 B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AC20C AC25C AC30C AC40C 50 71 71 88 88 2 Note 1) 80 80 80 105 105 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20C only, the position of the pressure gauge is above the piping center.