Aluminum High Vacuum Angle Valve

XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

Air Fittings & Tubing

(100) 71 (71) 44.5 46 16 Reference dimensions after R(PT) thread installation.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

CRJ

05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

C85

51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19

Rotary Gripper Series MRHQ

Models Note 1) Action Model Cylinder bore (mm) Opening/closing stroke (mm) Rotation angle () Weight g (lb) 306 (0.67) 90 MRHQ10D 4 10 305 (0.67) 180 598 (1.32) 90 MRHQ16D 6 16 596 (1.31) 180 Double acting 1055 (2.32) 90 MRHQ20D 10 20 1052 (2.32) 180 1561(3.44) 90 MRHQ25D 14 25 1555 (3.43) 180 307 (0.68) 90 MRHQ10S MRHQ10C 4 10 306 (0.67) 180 MRHQ16S MRHQ16C 600 (1.32) 90 6 16 598 (1.32) 180

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1

Modular F.R.L. Units

50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Tightening torque (Nm) 0.8 to 1.2 Hexagon socket head cap screw 11-6-4 5 Mini-rotary Actuator Rack & Pinion Style Series CRJ How to Order CRB2 Rotating angle CRBU2 90 100 180 190 90 100 180 190 CRB1 MSU CRJ B 05 90 E M9B S Basic type CRJ CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.

Table of Contents

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

MB1

to 800 to 1000 to 1000 to 1000 to 1000 B FD FE FT FX FY FZ Fd Port Cushion valve 32 40 50 63 80 100 4-FD 50 55 70 80 100 120 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 Fd B FY FT FE FX FZ Without air cushion Rear flange type/(G) Bore size (mm) ZZ Cushion valve Port 4-FD 32 40 50, 63 80, 100 147 151 172