MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Cylinder with Lock

2 (Different surfaces) 60 65 75 80 85 2 (Same surface) 90 95 100 105 110 D-G39 D-K39 D-A3 n (Different surfaces) 60 + 30 (n 2) (n = 2, 4, 6, 8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4,

Table of Contents

VAC, 100 VDC or less.

Free Mount Cylinder

, 100 Weight/( ): Denotes the values with D-A93.

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS

100

: 0.35 MPa/0.37 MPa (With valve) ZL6H (04P) Supply pressure: 0.5 MPa/0.52 MPa (With valve) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL6H ZL6H04P ZL6M ZL6M04P Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value

Modular Design with Uniform Body Style

50 200 Flow rate [L/min (ANR)] 0 50 100 Flow rate [L/min (ANR)] AFM30-D AFD30-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.01 0.01 P1 = 0.7 MPa P1 = 0.7 MPa 0 0 0 100 200 500 400 300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

by 90.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

30 40 50 60 70 80 90 02 Symbol Electrical entry CE/UKCAcompliant UL Standards 1/4 V 03 3/8 V V 04 1/2 V V 06 3/4 V 10 1 V 12 1 1/4 V 14 1 1/2 V 20 2 V 32 Flange 32A V 40 40A V 50 50A V 12 VDC G Grommet*1 *1 Cannot be used in combination with the aluminum body 24 VDC Thread 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC Grommet with PCB (With surge voltage suppressor) GS CS Conduit (With surge

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

Table of Contents

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1000 40 32 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (C rod retraction, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 50 m 1000 40 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (extension, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 m 50 1000 40 32 10 100 100 1000 Speed (mm/s) 31 Series CH2E

CY1

, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Integrated Controller

200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 EQFS32HB/Ball Screw Drive Horizontal/Lead 8 Vertical/Lead 8 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal

CNS

63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 Bore size (mm) K KA LD LH LS LT LX LY MM MA N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85 393 8 100 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 45 20 110 478 87.5 157.5 85.5 15 31 19 100 433

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

38 73 16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.