AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000

High Vacuum Angle Valve

temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Plug-in: For SS5Y -45 3 5 VQC VQZ SQ 5 5 SY 5 1 FU Single solenoid: VFS 5 SY 5 1 5C FU Double solenoid: VFR Series CE-compliant VQ7 3 SY300 5 SY500 Nil Q CE-compliant Type of actuation Manual override 1 Normally closed (N.C.) 2 Normally open (N.C.)

15

500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

REA/REB

25 20 15 10 D-Z7/Z8 9 6 6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

25 32 D-Z7/Z8 8 6 6 6 6 9 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

G thread 8-15-4 8-15-5 5 Magnetically Coupled Rodless Cylinder Basic Type Series CY3B 15, 20, 25, 32, 40 How to Order CY3B 25 300 Basic type Bore size Standard stroke 15 20 25 32 40 15 mm Refer to Standard Stroke below.

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

CY1

0.01 0.01 0.02 5 10 15 20 0 Moment ( Nm) 5 10 15 20 0 Moment ( Nm) 25 25 25 5 10 15 20 0 Moment ( Nm) CY1HT25, 32 CY1HT25, 32 CY1HT25, 32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 Deflection (mm) Deflection (mm) 0.03 0.04 0.02 0.03 CY1HT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 80 20 40 0 60 20 40 0 60 Moment ( Nm) Moment ( Nm) Moment ( Nm) Intermediate Stops Vertical operation 1) Intermediate

Table of Contents

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Table of Contents

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

CM2

12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

ZP

Form w 1 Material e Vacuum inlet B2 10 25 2.5 Construction p. 117 13 27.5 16 29 20 32.5 4 25 33 32 38 10 Adapter Assembly p. 121 B5 M5 x 0.8 5 8 25 2.5 13 27.5 16 29 20 32.5 4 25 33 32 38 40 47.5 4.9 12 50 51.5 20 M6 x 1 6 8 B6 N S U F GN GS ZP T B 38.5 3.5 M8 x 1.25 8 12 25 39 32 44 40 47.5 6.6 50 51.5 10 B8 31 2.5 13 33.5 16 35 20 38.5 3.5 25 39 32 44 40 47.5 7 50 51.5 Rc1/8 NPT1/8 NPTF1

MXQ

(L)-X12 25 43.5 B C MXQ-AT16(L) 5 24.5 MXQ16(L) J M10 x 1 M5 x 12 MXQ-AT16(L)-X11 15 33.5 35.5 20 12 17 14 5 34.5 MXQ-AT16(L)-X12 25 44.5 A K MXQ-AT20(L) 5 27.5 MXQ20(L) MXQ-AT20(L)-X11 M5 x 14 15 M12 x 1.25 41 44.5 25 13 37.5 23 17 6 MXQ-AT20(L)-X12 25 47.5 MXQ-AT25(L) 5 32.5 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-AT25(L)-X11 15 42.5 49 53.5 31 15 28 19 6 MXQ-AT25(L)-X12 25 52.5 1) Size of hexagon

V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Stability of suction position,

5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5

SQ1000/2000

A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 () SOL. A 4 () Station 6 SOL. B 17 () SOL. A 5 () Station 7 SOL. B 18 () SOL. A 6 () Station 8 SOL.

Proposals for Energy Saving

39.5 20 25 32 40 50 63 80 100 30.5 (40.5) 40.5 36 (46) 46 43.5 (53.5) 53.5 53 (63) 63 Bore size (mm) L1 O N Q Th9 L G1 4.5 5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062