Aluminum High Vacuum Angle Valve

, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface Left flange surface D K (DN) E H V I

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions

Battery-less

External Gripping State Internal Gripping State H : Overhang L : Gripping point H : Overhang L : Gripping point L L Gripping position H Gripping position H LEHF32 LEHF40 120 100 100 80 Overhang H [mm] Overhang H [mm] 80 40% 60 40% 60 40 Pushing force 100% Pushing force 100% 70% 70% 40 20 20 0 0 20 40 60 80 100 0 0 20 40 60 80 100 120 Gripping point L [mm] Gripping point L [mm] * Pushing force

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 100 50 63 80 100 Axial: Bottom (Short shaft side) This specification is not available for rotary actuators with auto switch.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 100 50 63 80 100 Axial: Bottom (Short shaft side) This specification is not available for rotary actuators with auto switch.

Square Tube Type Air Cylinder Series MB1

Switch spacers Applicable bore size (mm) 32, 40 50, 63 80, 100 Weight table (kg) BMP1-032 Switch spacer Bore size (mm) 32 80 63 50 40 100 Mounting brackets/Part nos.

Electric Actuator/Slider Type

25 20 to 35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 M6 x 1.0 12 95 28 40 117 7.3 60 32 Size Stroke range (mm) Without lock With lock A VB VC A VB VC 25 15 to 100 255.5 82.5 11.5 300.5 127.5 11.5 105 to 300 280.5 325.5 32 15 to 100 266.5 80 14 306.5 120 14 105 to 300 296.5 336.5 94 Series LEYG Support Block Guide for support block application

Table of Contents

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

LJ1H

Refer to page 100 for part numbers. 73

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

CLQ

115.5 125.5 10 to 50 75, 100 111.5 40.5 50 33.5 14 Series CLQ Dimensions/63, 80, 100 Double end tapped: CLQA63/80/100 RA RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

12 80 18 30 95 6.8 40 25 20 to 35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 M6 x 1.0 12 95 28 40 117 7.3 60 32 Size Stroke range [mm] Without lock With lock A VB VC A VB VC 25 15 to 100 255.5 82.5 11.5 300.5 127.5 11.5 105 to 300 280.5 325.5 32 15 to 100 266.5 80 14 306.5 120 14 105 to 300 296.5 336.5 757 LEYG Series AC Servo Motor Support

Air Cylinder Series MB

93 105 105 129 129 157 12 16 16 20 20 25 25 92 96 109 109 134 134 163 47 60 60 80 80 100 115 62 80 80 100 100 120 142 7 9 9 11 11 13.5 13.5 MB-S04 MB-S06 MB-S10 MB-S12 Double clevis pivot bracket B DX DB Z + Stroke DD B 90 B 4-DT A DH DS DA DL DU DU 4-DR DE DC DO DO Without air cushion (mm) Bore size (mm) Part No.

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

TABLE OF CONTENTS

Durometer A (80-90) V (70-80) G (75-85) U (80-90) B (70-80) I (80-90) R (70-80) X (70-80) C (55-65) N (90-95) L (80-90) D (70-80) H (70-80) P (90-100) Property Acrylonitrile Fluoroelastomer G. N. Ethylene-Propylene Rubber Elastomer Oil Resistance Excellent Excellent Good up to Fails up to 225 F. up to 400 F. 225 F.

ISO Standard Hydraulic Cylinder

100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Compact Cylinder with Lock Series CLQ

115.5 125.5 10 to 50 75, 100 111.5 40.5 50 33.5 14 Series CLQ Dimensions/63, 80, 100 Double end tapped: CLQA63/80/100 RA RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Guide Cylinder Series MGG

R 63 80 100 63 80 100 63 80 100 350 to 1100 308 107 54 86 108 192 30 72 14 29 119 16 300mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500mm or more 20