CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

MNB

100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

energy saving effect

HRS 100/150 HRSH 090 The product will be delivered in the packaging shown below.

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

Table of Contents

VAC, 100 VDC or less.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Environment

150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VV4Z1-25Station U-00C L plug connector (L) M plug connector (M) DIN terminal (D) (Pitch) D side U side (Station n)(Station 1) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

Table of Contents

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Thermo-chiller

RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

smcmaintenancepartslist

size 32 3 to 4 1 125 15 to 17 3 100 8 to 10 2 80 6 to 8 1.5 63 4 to 5 1.5 50 3 to 5 1 40 3 to 4 1 100 st Extra 50 st 344 Series CL1 40 to 100 Replacement Procedure of Seal 3 6.

CY1

, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.