Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting

Refrigerated Air Dryers

, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15 A IDF100F 30 A IDF125F IDF150F IDF190D 50 A IDF240D IDF370D 60 60 50 46 IDU37E-30 146 122 IDU55E-30 148 55 36 IDU75E-30 166 73 70 IDF100F to 150F Dimensions [mm] A Model A B IDF100F 434

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

LEF-OM006xx

() 452000Hz 1 () 4 5 6 7 8 <-> LEFS 16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5

SQ1000/2000

25 30 50 Note) Available in units of 10 pieces.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

AZ1000

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

CG1

300 Up to 300 Up to 300 Up to 500 Up to 500 Up to 600 Up to 600 Up to 600 Up to 600 Z Front Z Rear ZZ Bore (mm) TZ TY TX TW Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot 20 25 32 40 50 63 28 28 28 30 36 46 16 20 22 30 36 46 47.6 53 42 42 48 56 64 74 66+l 73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l

2 Phase Stepper Motor/Without Motor Brake Series LXP

D Refer to page 300 for mounting.

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

VDW

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover Groove For other voltages of AC: SY100 30 3A DC polar indication Lever Pin Without lead wire: SY100 30 A -+ Socket Lead wire length Nil 6 10 15 20 25 30 50 (with connector and 2 of sockets only) 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire

25

200 250 300 Installation distance (mm) 2) With high speed de-ionizing cartridge, With air purge 3) With energy saving type de-ionizing cartridge, With air purge Supply pressure: 0.1 MPa (8.6 L/min [ANR] per cartridge) Supply pressure: 0.1 MPa (4.3 L/min [ANR] per cartridge) 0 2 4 6 8 10 12 14 16 18 20 0 2 4 6 8 10 12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz

0.4

Connector assembly 6 43 Connector lead wire length (mm) Blanking plate with connector 4-wire 2-wire 43 44 Nil 300 600 1000 2000 3000 Nil 300 20 25 30 2000 Connector 6 10 20 30 6 10 15 600 2500 SV Nil Without connector With connector/2-wire With connector/4-wire 1 2 1000 3000 Lead wire color: Black Lead wire color: Red 1500 SYJ Lead wire color: White 24AWG Blanking plate with a connector for

LEC-OM07605CN

(2) (a) () TDKZCAT3035-1330NEC TOKINESD-SR-250GRFC-13 ZCAT3035-1330(TDK) [] [mm] 131 10MHz100MHz 100MHz500MHz 80 150 3 9 1 301 34 1 (ZCAT3035-1330) (B) () AC ON OFF MC MC SK 20 cm ()CR-50500(OKAYA) C [30%] mm] R AC [V] [F20%] :625V AC50/60Hz 60s -2000V AC 50/60Hz 60s 250 0.5 50 (1/2W) AWG 18 (18.5+2)1 151 3.6 61 61 300 300 481.5 161 (18.5+5) DC 4 2 + RA 11 21 11.

Series AK1000

0.21 60 0.41 50 0.34 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30