7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC Note) For symbol, refer to page 741.

Rotary Clamp Cylinders

BQ-2 1.5 M3 x 0.5 x 8 l BQ-1 1 D-A7 D-A8 D-F7 D-J7 Auto switch mounting screw BQ2-012 5 M3 x 0.5 x 10 l BQ-2 1 BBA2 BQP1-050 16 Auto switch mounting nut (Square nut) BQ-1 1 M3 x 0.5 Auto switch mounting nut (Convex type) BQ-2 1 M3 x 0.5 Note) When using BQ-1, BBA2 may be used by itself.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Note) The tightening torque for the cross recessed round head screw (M3 x 6.5 L) is 0.37 to 0.52 lbfft (0.5 to 0.7 Nm).

Rotary Table/Rack & Pinion Style Series MSQ

x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Q SD SF SU UU WA WB WC WE WF XA XB XC YA YB YC Size 3.5 50.5 16 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 56 18 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 60 20.5 15.2

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

EX120/121/122

14 to 26.4 VDC 24 VDC+10%/5% (Common power supply) For unit 11 to 25 VDC 24 VDC10% (Common power supply) Power supply For valve 24 VDC+10%/5% Internal current consumption (Unit) 100 mA or less Output type NPN output (+COM.)

0.4

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

PSE550/300

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

ZX

to plug connector Y 24 VDC and 12 VDC are applicable to 0.45 W.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

2–4

D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Electrical entry direction Perpendicular In-line Perpendicular In-line Perpendicular In-line 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay IC, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)

V

Base Mounted Without Subplate M3 With Subplate V O LTA G E 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without

Base Mounted Metal Seal/Rubber Seal Series VQ

No. of output points, 16 point M3 screw Item Specifications 24 VDC, +10%, 5% External power supply For details on specifications and handling, refer to the separate technical instruction manual.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

6 12 VDC 1 100 VAC 2 200 VAC V 6 VDC 3 110 VAC [115 VAC] CEcompliant DC AC S 5 VDC R 3 VDC 4 220 VAC [230 VAC] LN, MN type: With 2 sockets.

7

3/8 Stainless steel E 230 VAC B N.O. 1/2 F 24 VDC L M 5 20A C37 N.C.

0.55

DC 5 6 24 VDC 12 VDC Made to Order Nil AC (50/60 Hz) Pilot exhaust port with piping thread (M3) specification (Refer to page 24).