Fluoropolymer Piping Equipment

1/2" 3/8" 23 LQ1B35-M 8 5.5 9 29 LQ1B4B-M 3/8" 5.8 LQ1B36-M 6 3.6 LQ1B39-M 10 1/8" 18.4 29 21.9 4.4 4.4 LQ1B310-M 8 4.4 6 24 9 18 21 43 28 10 LQ1B4C-M 1/2" 1/2" 24.5 32 9 LQ1B4D-M 3/8" 5.8 LQ1B4G-M 1/2" 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1B41-M 12 3/8" 23 9.4 29 LQ1B5A-M 3/4" 1/2" 30.5 LQ1B42-M 10 7.4 10 10 38 6 24 9 18 21 43 28 10 LQ1B5B-M 1/2" 9 LQ1B43-M 12 1/2" 24.5 32 9.4 LQ1B5C-M

Air Fittings & Tubing

A B Effective area (mm2) Weight (g) M-5ALHN-4 M-5ALHU-3, -4 12 14 11.5 12.3 14.3 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 3.2 3.7 3.2 3.3 3.9 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 SM5B, #11 to #15 Kl M-5ALHN-6 M-5ALHU-6 Ml Hl Dl MS Hose nipple: M-5H-4, -6 Tl C D Part No.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.

Vacuum Saving Valve

No.0.8 L1 L3 L2 L3 (L4) No.0.8 H 2 H 2 H 2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-AG1ZP2V-A5ZP2V-A8Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H 1 Vacuum generator side L2 L3 3 H 1 M2 H 1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H 2 H 2 L1 L1 L1 H 2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 2000 1000 1000 LEC Y 800 800 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m Me L4 600 600 1000 1000 X Motorless 400 400 500 500 200 200 LAT 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000

240

kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

Support Guide/11-LEFG Series

kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

Table of Contents

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Series KV2 Fittings

m m m p p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 40 or less, Pipe Port Type: One-Touch Plumbing, Port Size

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 40 or less, Pipe Port Type: One-Touch Plumbing, Port Size

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 40 or less, Pipe Port Type: One-Touch Plumbing, Port Size

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 40 or less, Pipe Port Type: One-Touch Plumbing, Port Size

Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Electrical Entry: LO (Plug Connector w/o Connector), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: L5 (Top Ported M5 Thread)