Electric Actuator/Slider Type

H VC 21 Rod operating range Note 1) (Stroke + 4 mm) 4 x M OA through 4 x NA thread depth NB U J EV V Section Y XA H9 depth XA (FC) Section XX GA Q S M EA EB C Y 0.5 FA FB EH T X B + Stroke A + Stroke Note 1) Range within which the rod can move.

MG

mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) 8-19-15 Series MGP Horizontal Mounting (Ball bushing bearing) (17) l = 50 mm, V = 200 m/s (18) l =

3 Port Air Operated Valve Series SYJA300

A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer to page 4-4-61 for dimensions with connector cable.

ZP

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

MNB

P-76 (M)

Free Mount Cylinder

Where the wiring length to load is greater than 5 m. Where the load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to the Option on page 51 to order it separately.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

2/3 Port Valve

G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is valued

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2 2 0.5 12 4 27 25.5 26 24 14 25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q

10

Bore size [mm] Dd9 L l m d Part no.

Vacuum Pad

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

R (NPT) Port size A N L2 L2 LQ2L21-M LQ2L22-M LQ2L23-M LQ2L24-M LQ2L31-M LQ2L32-M LQ2L33-M LQ2L34-M LQ2L35-M LQ2L36-M LQ2L41-M LQ2L42-M LQ2L43-M LQ2L44-M LQ2L51-M LQ2L52-M LQ2L53-M LQ2L54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 (A) 1/4 1/8" 20.5 (M) (M) 38 19.9 19 24 18 VC 1/4" 18 H (E) VDW L1 43 Class 2, 3 1/4" 22 42.5 VQ 26.2 22 28 24 43 3/8" 21.5 VX2 42.5 52 51 52 51 59 58 59

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

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