10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10C)5.9(at ?10C)?0.10.65/0.95(at 30 l/min)30Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Stopper Cylinder

to 70C With auto switch: 10C to 60C (No freezing) Lever Round Bar Lubricant Not required (Non-lube) Cushion Rubber bumper Stroke length tolerance +1.4 0 0 *1 Piston speed 50 to 500 mm/s Mounting Through-hole, Both ends tapped *1 Stroke length tolerance does not include the amount of bumper change.

Air Slide Table

Specifications Ambient temperature 10C to 100C (No freezing) Seal material Fluororubber MXQ X2128 Standard model no. Grease Heat-resistant grease (GR-F) Heat-resistant specification Applicable adjuster type Metal stopper Specifications other than the above are the same as the standard type.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 200, 250, 300 Single rod 1/8 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Stroke length tolerance +1.0 0 50 to 400 mm/s Piston speed Mounting Grease Cleanliness class (ISO class) Basic/Double-side bossed/Single foot/Double foot/Rod flange/Head flange 10-/11-: Fluorine grease

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 200, 250, 300 Single rod 1/8 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C

Non-contact Gripper XT661 Series

. * Air purication rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient

10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Specifications Bore size (mm) Item 15/20/25/32/40 1.05MPa 0.7MPa 15, 20: 0.16MPa, 25: 0.15MPa, 32: 0.14MPa, 40: 0.12MPa 10C to 60C (With no freezing) 50 to 400 mm/s 0 to 250 st: , +1.0 0 251 to 1000 st: , +1.4 0 1001 st to: +1.8 0 Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Mounting bracket Grease 2 mounting

JIS Standard Hydraulic Cylinder

. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

to 70C (No freezing) With auto switch: 10C to 60C Cushion Rubber bumper (Standard equipment) Lubrication Not required (Non-lube) Stroke length tolerance +1.0 0 Piston speed 5 to 500 mm/s Symbol Rubber bumper Allowable kinetic energy 10 0.035 J 16 0.090 J Smooth Cylinders Low Speed Cylinders Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item Size Suction flow rate L/min (ANR) 6 10 16/20/25 6 10/16 20/25 6 10 12 1.05 MPa 0.7 MPa 0.12 MPa Without auto switch : 10C

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16: 0.07 MPa, 20, 25: 0.05 MPa Without auto switch : 10C

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Specifications Bore size (mm) Item 6 10 15 20 25 32 40 50 63 1.05 MPa Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance 0.7 MPa 0.16 MPa 0.15 MPa 0.14 MPa 0.12 MPa 10C to 60C (No freezing) 50 to 400 mm/s 0 to 250 st: , +1.0 0 251 to 1000 st: , +1.4 0 Over 1001 st: +1.8 0 Mounting bracket Grease 2 mounting

CV/MVGQ

A1 E1 L1 MM NZ RR1 U1 ND L NX Y-04C 3 x 18l 16 + 0.3 + 0.1 22 24 55 M14 x 1.5 13 25 55.5 Polished round 12 38 12 Y-05C 50, 63 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 27 55.5 Polished round 12 38 12 Knuckle Pin, Clevis Pin Y-08C 80 4 x 25l 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 28 76.5 Polished round 18 55 18 Y-10C 100 4 x 30l 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 38 83 Polished round 20

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage 20 to 60 Ambient temperature (C) Fluid temperature (C) 10 Note) to 60 Seal material Leakage rate (Air) Note 1) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 15 cm3/min or less (AIuminum body type) 15 cm3/min or less (Resin body type) 2 cm3/min or less (Metal body type) 10 cm3/min or less Note) Dew point temperature: 10C

Compact Cylinder with Air Cushion

For more information, refer to page 15. 1 Compact Cylinder with Air Cushion Series RQ Specifications Type Fluid Proof pressure Pneumatic (non-lube) type Air 1.5MPa 1.0MPa 0.05MPa Maximum operating pressure Minimum operating pressure Without auto switch: 10C to 70C (with no freezing) With auto switch : 10C to 60C (with no freezing) Ambient and fluid temperature Rod end threads Rod end thread