Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Electric Actuators

31 G 28 58 5H9 depth 5 +0.030 0 2-M3 x 0.5 10.5 D-M4 x 0.7 (for work piece mounting) 12 2-M3 thread depth 5 Effective thread depth 4 (PE terminal) (3.5) 6 4-8 50 17.5 22 25 35 18.5 10 20 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 10 (39.5) E 25 (4) Motor wire (300mm) Stroke + 135 30.5 The dimension inside [ ] shows the location

VQZ1000/2000/3000

part number consists of 10 units.

TABLE OF CONTENTS

) Manual Overide version (DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS121F-M3-23 AS121F-M3-01 3.2 7.2 16.1 19.7 26.6 24.1 24 21.5 4 8.4 10.5 7.2 19.7 26.6 24.1 21.5 4 8.4 10.5 10 12.7 5.5 5.5 16.1 24 10 12.7 M3 x 0.5 M3 x 0.5 AS121F-M3-04 AS121F-M3-03 4 9.3 5/32" 9.3 AS121F-M5-23 AS121F-M5-01 1/8" M5 x 0.8 M5 x 0.8 17.3 8.4 17.3 22.1 3.2 22.1 8.4 AS121F-U10/32-23 AS121F-U10/32-01 12.7 1/8" 10-32UNF 10-32UNF 9.6 12.3 7 12.7 25 12.3 28.6 25.8 22.2 8 AS121F-M5

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Wedge Cam Operation Gripper Series MHK2

Scale: 37% (mm) 9 2-M3 X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing

MHK2

Internal Grip External Grip MHKL2-12S MHKL2-12C 20 15 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 15 Pressure 0.6 MPa MHZ 10 0.5 MPa 0.5 MPa 10 MHF 0.4 MPa 0.4 MPa 5 5 MHL 0.3 MPa 0.3 MPa F F 0 0 MHR 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.

Wedge Cam Operation Provides

depth 3 +0.025 0 2-M3 X 0.5 thread depth 6 (Mounting thread) 4-M4 X 0.7 thread depth 8 (Mounting thread) 13H9 1.5 deep +0.043 0 0 -0.1 Bottom hole dia. 3.4 through (Mounting hole) 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 depth +0.025 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Thread for mounting attachment) M3 X 0.5 (Finger closing

Stopper Cylinder

10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

MHF2

Accessory option: Hexagon socket head screw (special screws) 3 3 6 6 2-2H9 +0.025 0 depth 2 10 10 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 22 9 Low Profile Air Gripper Series MHF2 Dimensions MHF2-8D1 Scale: 80% 2.5H9 +0.025 0 depth 2.5 28 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3.4 40.3 3 32 48 2-M3 x 0.5 thread depth 4 Mounting

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

MHF2

the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3 12 26 4 15 Accessory option: Hexagon socket head screw (special screws) 3 3 6 6 2-2H9 +0.025 0 depth 2 10 10 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting

MHF2

12 26 4 15 Accessory option: Hexagon socket head screw (special screws) 3 3 6 6 2-2H9 +0.025 0 depth 2 10 10 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 22 12-3-12 13 Series MHF2 Low Profile Air Gripper Dimensions MHF2-8D1 2.5H9 +0.025 0 depth 2.5 28 2.5H9 +0.025 0 depth 2.5 MHZ MHF MHL MHR 2-M3 x 0.5 thread depth 7 Mounting thread MHK Courtesy of Steven Engineering