CNA

144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 255 M10 x 1.25 11 22 17 M22 x 1.5 37 1/2 59.5 to 62.5 71 218 59.5 15 0 307 M12 x 1.75 11 26 17 M26 x 1.5 40 1/

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Type of auto switch Nil

Electric Actuator/Slider Type

(Refer to page 42.)

CV/MVGQ

11 9 9 11.5 13.5 13.5 40 45 50 65 75 184.6 187.6 208.6 240.6 245.6 3.2 3.2 3.2 4.5 6 42 50 59 76 92 8 11 11 13 16 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 157 167 180 203 220 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

11 184.6 187.6 208.6 240.6 245.6 3.2 3.2 3.2 4.5 6 9 9 11.5 13.5 13.5 40 45 50 65 75 42 50 59 76 92 8 11 11 13 16 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 157 167 180 203 220 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

MXQ

x 0.8 MXQ-CS6(L)-X11 15 25.5 MX MXQ-CS8(L) 5 18 B MXQ8(L) 7 22 7.5 8 16.6 14.6 9 3 8 9.8 MXQ-CS8(L)-X11 M3 x 8 M3 x 10 M6 x 1 15 28 MTS F MXQ-CS8(L)-X12 25 38 G E MXQ-CS12(L) 5 22 MY C MXQ12(L) M8 x 1 M4 x 12 M4 x 12 MXQ-CS12(L)-X11 9.5 29 11 12 20.5 18.5 14 4 11 13 15 32 MXQ-CS12(L)-X12 25 42 CY Table mounting section MXQ-CS16(L) 5 23 MXQ16(L) Q M10 x 1 MXQ-CS16(L)-X11 M5 x 16 M5 x 16 11

MGP

29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37

CRB2/CRBU2/CRB1

9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

KJ

38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 15.5 2.5 1 8 Applicable tubing Applicable tubing 1 4 3 16 16 3 5 32 1 4 1 4 5 16 3 8 3 8 1 2 1 2 3 16 16.5 3.5 1 4 17 4.6 18.5 6 5 16 3 8 21 7 Note) D: Max. diameter Male Elbow: KQ2L Connection thread UNF NPT 10-32 UNF Applicable tubing O.D.

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CQS

to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 FZ FX FV FT FD 55 55 60 64 45 45 48 52 25 30 39 42 5.5 5.5 8 8 4.5 4.5 6.6 6.6 CDQSG Bore size SCQS Bore size , #4 (#4+#11+#13) (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

HRX-OM-S004

Air cooled type only Fig. 8-10 Positions of danger warning label Fig. 8-11 Positions of danger warning label 8.6 Types of Hazard Labels (HRS -40/46) HRS Series 8-16 HRX-OM-S004 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-7 Standards Standard Model CE Mark EMC Directive 2014/30/EU HRS--40HRS--46Machinery Directive 2006/42/EC NRTL E112803(

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

ZP

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100