25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

Intrinsically Safe Valve

Type 42/External Pilot Capable Add the valve and option part number under the manifold base part number.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

ZP

34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB ZP80HB Dimensions Model ZP100HB

VQ7-6/7-8

pressure): VQ7-8-YZ-S-SC 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 VK Manual override A B PB (11) 10 12 (16) 16 (23) (22) 16 VZ 62(72) 75(86) 62(72) 75(86) 50 A VF Cable with connector PA R1 R2 P VFR (L 500) B A Mounting hole 2-7.5 5-3/8, 1/2, 3/4 2-1/8 49(64) 49(64) 44 (58) 44 (58) 18 (20) (20) 18 Indicator

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

CG1

A CM2 NZ L NX A1 E1 U1 L1 MM R1 ND +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 20 25, 32 40 50, 63 80 100 8.5 16 20 22 28 38 44 25 30 30 40 50 55 M8 X 1.25 10.3 11.5 14 14 20 27 31 34 41 42 56 71 79 8 10 10 14 18 22 8 10 18 22 28 32 10.5 14 18 21 21 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CG5-S

18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

CJ5-S

18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100

CJ5-S

18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100

VQ7-6/7-8

18 (20) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 2-Rc3/8, 1/2, 3/4 Ports A, B 30 (42) 30 (42) 10 (11) Dimensions inside ( ) are for Rc3/4 2 position/Single : VQ7-8-FG-DSC Single (reverse

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.